Design of multi-degree-of-freedom ultrasonic micromotors

Japanese Journal of Applied Physics

Volumn 48, Issue 7 PART 2, 2009, Pages

  Goda, Yasuyuki ^a   Koyama, Daisuke ^a   Nakamura, Kentaro ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC COUPLING; BALL ROTOR; EXCITATION METHODS; EXCITED VIBRATIONS; FINITE ELEMENT ANALYSIS; MULTI-DEGREE-OF-FREEDOM; OPERATING PRINCIPLES; ORTHOGONAL DIRECTIONS; PIEZOELECTRIC ELEMENTS; RESONANCE FREQUENCIES; THIN DISK; TWO-DIMENSIONAL ARRAYS; ULTRASONIC MICROMOTORS; ULTRASONIC MOTORS;

ACTUATORS; DISKS (STRUCTURAL COMPONENTS); MOTORS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; RESONANCE; ULTRASONIC DEVICES; ULTRASONICS;

VIBRATION ANALYSIS;

EID: 72049106126     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.07GM06     Document Type: Article

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