Delta-shaped piezoelectric ultrasonic motor for two-dimensional positioning

Japanese Journal of Applied Physics

Volumn 47, Issue 1, 2008, Pages 313-318

  Park, Seung Ho ^a   Agraz, Jose ^a   Tuncdemir, Safakcan ^a   Kim, Young Deog ^b   Eitel, Richard E ^a   Baker, Amanda ^a   Randall, Clive A ^a   Uchino, Kenji ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b Research Institute of Industrial Science and Technology (RIST)   (South Korea)

Author keywords

2 degrees of freedom; Nano positioning; Piezoelectric; Ultrasonic motor

Indexed keywords

FINITE ELEMENT METHOD; GROUNDING ELECTRODES; TWO DIMENSIONAL; ULTRASONIC EQUIPMENT;

BIMORPH STRUCTURE; NANO POSITIONING; PIEZOELECTRIC ULTRASONIC MOTOR; ULTRASONIC MOTOR;

PIEZOELECTRIC DEVICES;

EID: 38549084650     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.313     Document Type: Article

References (7)

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