Processing of micro-components made of sintered reaction-bonded silicon nitride (SRBSN). Part 2: Sintering behaviour and micro-mechanical properties

Ceramics International

Volumn 36, Issue 2, 2010, Pages 707-717

  Müller, Marcus ^a   Rögner, Joachim ^b   Okolo, Brando ^b   Bauer, Werner ^a   Knitter, Regina ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

A. Sintering; C. Strength; D. Si3N4; Micro components

Indexed keywords

C. STRENGTH; GRAIN SIZE; LIMITING FACTORS; MICRO-BENDING; MICRO-COMPONENTS; MICRO-MECHANICAL; MICRO-SCALES; POWDER BED; REACTION-BONDED SILICON NITRIDES; RESIDUAL POROSITY; SAMPLE SURFACE; SECONDARY PHASIS; SILICON GRAINS; SINTERING ADDITIVES; SINTERING AID; STRENGTH VALUES; SURFACE-TO-VOLUME RATIO; THREE-POINT BENDING TEST;

ADDITIVES; BENDING STRENGTH; BENDING TESTS; GRAIN SIZE AND SHAPE; MECHANICAL PROPERTIES; PARAFFIN WAXES; PARAFFINS; SILICON; SILICON NITRIDE; SILICON OXIDES;

SINTERING;

EID: 71849100628     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2009.11.008     Document Type: Article

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