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Volumn 60-61, Issue , 2009, Pages 380-387
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Research on side-insulation of tool electrode for micro electrochemical machining
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Author keywords
Micro array electrode; Micro electrochemical machining (micro ECM); Side insulation; Spin coating
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Indexed keywords
ADHERENCE STRENGTH;
DOUBLE LAYERS;
DURABILITY TEST;
EPOXY COATINGS;
HIGH ASPECT RATIO STRUCTURES;
INSULATION FILMS;
INSULATION MATERIALS;
MACHINING ACCURACY;
MICRO ARRAY ELECTRODES;
MICRO-ECM;
MICRO-ELECTROCHEMICAL MACHINING;
MICRO-TOOL;
PROCESSING PARAMETERS;
RUBBING PROCESS;
SIDE-INSULATION;
SINGLE ELECTRODES;
TOOL ELECTRODE;
VERY THIN FILMS;
ASPECT RATIO;
COATINGS;
ELECTRIC DISCHARGE MACHINING;
ELECTROCHEMICAL CUTTING;
EPOXY RESINS;
INSULATING MATERIALS;
SPIN DYNAMICS;
TECHNOLOGY;
ELECTROCHEMICAL ELECTRODES;
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EID: 71849084161
PISSN: 10226680
EISSN: None
Source Type: Book Series
DOI: None Document Type: Conference Paper |
Times cited : (21)
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References (9)
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