Micro-electrochemical machining using multiple tool electrodes

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1451-1457

  Park, Min Soo ^a   Chu, Chong Nam ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; MOSFET DEVICES; MULTILAYERS; THROUGHPUT; ULTRASHORT PULSES;

MICRO-ELECTROCHEMICAL MACHINING TECHNIQUE; PULSE DURATION;

MEMS;

EID: 34547665059     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/006     Document Type: Article

References (12)

1. Bhattacharyya B and Munda J 2003 Experimental investigation on the influence of electrochemical machining parameters on machining rate and accuracy in micromachining domain Int. J. Mach. Tools Manuf. 43 1301-10
2. Kim B H, Ryu S H, Choi D K and Chu C N 2005 Micro electrochemical milling J. Micromech. Microeng. 15 124-9
3. Kim B H, Park B J and Chu C N 2006 Fabrication of multiple electrodes by reverse EDM and their application in micro ECM J. Micromech. Microeng. 16 843-50
4. Kock M 2004 Limitation and possibilities of the electrochemical microstructuring with ultrashort voltage pulses PhD Dissertation Freie Universität, Berlin
5. Bhattacharyya B, Doloi B and Sridhar P S 2002 Electrochemical micromachining: new possibilities for micromachining Robot. Comput. Integr. Manuf. 18 283-9
6. Nelson J B and Schwartz D T 2005 Electrochemical printing: in situ characterization using an electrochemical quartz crystal microbalance J. Micromech. Microeng. 15 2479-84
7. Lee E S, Baek S Y and Cho C R 2007 A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses Int. J. Adv. Manuf. Technol. 31 762-9
8. Schuster R, Kirchner V, Allongue P and Ertl G 2000 Electrochemical micromachining Science 289 98-101
9. Park B J 2006 Effects of tool electrode size on micro electrochemical machining using ultra short pulses PhD Dissertation School of Mechanical and Aerospace Engineering, Seoul National University
10. Park B J, Kim B H and Chu C N 2006 The effects of tool electrode size on characteristics of micro electrochemical machining CIRP Ann. 55 197-200
11. Rajurkar K P, Zhu D, McGeough J A, Kozak J and De Silva A 1999 New developments in electro-chemical machining CIRP Ann. 48 567-79
12. Wang J Y et al 1995 The investigation of the MOSFET power characteristics in PECM Application Proc. ISEM 11 505-9