Oriented assembly and nanofabrication of zeolite A monolayers

Microporous and Mesoporous Materials

Volumn 126, Issue 3, 2009, Pages 228-233

  Öztürk, Seçkin ^a   Akata, Burcu ^a  

^a MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

Author keywords

E beam lithography; Monolayer; Si wafer; Zeolite

Indexed keywords

DOUBLE LAYERS; E-BEAM LITHOGRAPHY; EFFICIENT METHOD; HIGH PRECISION; LIMITS OF FORMING; MICROPATTERNS; NANO-SIZED; NANOFABRICATION; ORIENTED ASSEMBLY; PATTERN RESOLUTION; SI WAFER; ZEOLITE NANOCRYSTALS; ZEOLITE-A;

ELECTRON BEAM LITHOGRAPHY; ELECTRON ENERGY LEVELS; MONOLAYERS; NANOCRYSTALS; SILICATE MINERALS; SILICON; SILICON WAFERS; ZEOLITES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 71749121385     PISSN: 13871811     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.micromeso.2009.06.010     Document Type: Article

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