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Volumn 14, Issue 3, 2007, Pages 325-329

Zeolite LTA deposition on silicon wafer

Author keywords

Clear solutions; Silicon surface; Zeolite films; Zeolite LTA

Indexed keywords

ADHESION; CRYSTALLIZATION KINETICS; DEPOSITION; HYDROTHERMAL SYNTHESIS; SILICON WAFERS; SURFACE CHEMISTRY;

EID: 37249005902     PISSN: 13802224     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10934-006-9067-1     Document Type: Article
Times cited : (10)

References (23)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.