All optically driven MEMS deformable mirrors via direct cascading with wafer bonded GaAs/GaP PIN photodetectors

2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPTMEMS 2009

Volumn , Issue , 2009, Pages 156-157

  Mathur, Vaibhav ^a   Vangala, Shivashankar R ^a   Qian, Xifeng ^a   Goodhue, William D ^a   Haji Saeed, Bahareh ^b   Khoury, Jed ^b  

^a UNIVERSITY OF MASSACHUSETTS LOWELL   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAAS; MEMS DEFORMABLE MIRROR; MICROMIRROR ARRAY; OPTICALLY CONTROLLED; P-I-N PHOTODETECTORS; PHASE CORRECTIONS;

GALLIUM ALLOYS; MEMS; MICROELECTROMECHANICAL DEVICES; MIRRORS; NANOPHOTONICS; OPTOELECTRONIC DEVICES; PHOTODETECTORS; SILICON NITRIDE; SILICON WAFERS; WAFER BONDING;

PHOTONICS;

EID: 71749121302     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2009.5338614     Document Type: Conference Paper

References (3)

1. G.Griffith et al "Patterned multipixel membrane mirror MEMS optically addressed spatial light modulator with megahertz response," IEEE Photonics Technology Letters, Vol.19(3) pp. 173-175 (2007).
2. B. Haji-saeed et al "Photoconductive optically driven deformable membrane under high-frequency bias: fabrication, characterization and modeling," Applied Optics, Vol. 45(14), pp..3226-3236 (2006).
3. A Tarrafl et al "Stress investigation of PECVD dielectric layers for advanced optical MEMS," J. Micromech. Microeng. Vol. 14, pp. 317-323 (2004).