Thermo-optic properties of TiO2, Ta2O5 and Al2O3 thin films for integrated optics on silicon

Thin Solid Films

Volumn 517, Issue 24, 2009, Pages 6847-6849

  Wiechmann, Stefan ^a   Müller, Jörg ^a  

^a HAMBURG UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Al2O3; Elasto optic; Ellipsometry; Integrated optics; Stress; Ta2O5; Thermo optic; TiO2

Indexed keywords

AL2O3; ELASTO-OPTIC; TA2O5; THERMOOPTICS; TIO;

ALUMINUM; DIELECTRIC MATERIALS; ELLIPSOMETRY; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL MATERIALS; OXIDE FILMS; PHOTONICS; SEMICONDUCTING SILICON COMPOUNDS; SILICA; TANTALUM; TANTALUM COMPOUNDS; THERMAL EXPANSION; THIN FILMS; TITANIUM; TITANIUM DIOXIDE; TITANIUM OXIDES;

INTEGRATED OPTICS;

EID: 71749112459     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.05.040     Document Type: Article

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