Cylindrical ultrasonic linear microactuator based on quasi-traveling wave propagation on a thin film metallic glass pipe supported by a piezoelectric ceramic tube

Sensors and Actuators, A: Physical

Volumn 156, Issue 2, 2009, Pages 359-365

  Sun, Dongming ^a   Wang, Sheng ^a   Hata, Seiichi ^a   Sakurai, Junpei ^a   Shimokohbe, Akira ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Cylindrical; Linear; Microactuator; Ultrasonic; Vibration

Indexed keywords

BIDIRECTIONAL MOTION; CYLINDRICAL STATOR; ELASTIC MATERIALS; ELLIPTICAL MOTION; FINITE ELEMENT SIMULATIONS; LINEAR; MAXIMUM VELOCITY; SIMULATIONS AND MEASUREMENTS; THIN FILM METALLIC GLASS; TRAVELING WAVE; ULTRASONIC VIBRATION;

GLASS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC CERAMICS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; PIPE; STATORS; THIN FILM DEVICES; THIN FILMS; ULTRASONICS;

METALLIC GLASS;

EID: 71649092745     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2009.10.004     Document Type: Article

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26. The video of the bi-directional motions of the microactuator is available on line.