Development of a Biomimetic MEMS based Capacitive Tactile Sensor

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 124-127

  Muhammad, H B ^a   Oddo, C M ^b   Beccai, L ^b   Adams, M J ^a   Carrozza, M C ^b   Hukins, D W ^a   Ward, M C ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

^b SCUOLA SUPERIORE SANT ANNA   (Italy)

Author keywords

biomimetic; capacitive sensor; MEMS; tactile array

Indexed keywords

CAPACITIVE SENSOR; CORE ELEMENTS; FABRICATION PROCESS; OPTIMIZED DESIGNS; SENSING DEVICES; SENSOR PERFORMANCE; SILICON-BASED; TACTILE DEVICE; TACTILE EXPLORATION; TACTILE SENSORS;

MEMS; MICROELECTROMECHANICAL DEVICES; SENSOR ARRAYS;

BIOMIMETICS;

EID: 71549172787     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.031     Document Type: Conference Paper

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