GaAs based micromachined thermal converter for gas sensors

Sensors and Actuators, A: Physical

Volumn 142, Issue 1, 2008, Pages 147-152

  Lalinsky T ^a   Drzik M ^b   Jakovenko, J ^c   Vanko, G ^a   Mozolová, Ž ^a   Haščík, Š ^a   Chlpik J ^b   Hotovy I ^d   Rehacek V ^d   Kostic I ^e   Matay, L ^e   Husak M ^c  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

^b INTERNATIONAL LASER CENTER   (Slovakia)

^c CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

^d SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

^e INSTITUTE OF INFORMATICS   (Slovakia)

Author keywords

GaAs micromachining; GaAs thermal converter; Gas sensor; MEMS; Thermal resistance; Thermal time constant

Indexed keywords

CHEMICAL SENSORS; HEAT RESISTANCE; MEMS; MICROMACHINING; TEMPERATURE DISTRIBUTION;

GAAS MICROMACHINING; GAAS THERMAL CONVERTER; THERMAL TIME CONSTANT;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 38849184044     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.05.014     Document Type: Article

References (10)

1. Lalinský T., Držík M., Jakovenko J., and Husák M. In: Leondes C.T. (Ed). MEMS/NEMS Handbook: Techniques and Applications (2006), Springer com, USA 49-109 (chapter 3)
2. Mo Y., kawa Y., Tajima M., Nakai T., Yoshiike N., and Natukawa K. Micro-machined gas sensor array based on metal micro-heater. Sens. Actuat. B 79 (2001) 175-181
3. Aslam M., Gregory C., and Hattfield J.V. Polyimide membrane for micro-heated gas sensor array. Sens. Actuat. B 103 (2004) 153-157
4. 2 thin film bilayer and thin film heater. Sens. Actuat. B 109 (2005) 185-189
5. Barconciny M., Placidy P., Cardinali G.C., and Scorzoni A. Thermal characterization of a microheater for micromachined gas sensors. Sens. Actuat. A 115 (2004) 8-14
6. Piugcorbe J., Vogel D., Michel B., Vila A., Gracia I., Cane C., and Morante J.R. Thermal and mechanical analysis of micromachined gas sensors. Micromech. Microeng. 13 (2003) 548-556
7. Y.M. Chiang, J. Lau, M. Bachman, G.P. Li, H.K. Kim, Y. Ra, K. Ketola, Mater. Res. Soc. Symp. Proc. 729, Material Research Society, 2006, U3.1.1-U3.1.6.
8. Haščík S., Lalinský T., Kuzmík J., Porges M., and Mozolová Z. Fabrication of thin GaAs cantilever beams for power sensor microsystem by RIE. Vacuum 47 (1996) 1215-1217
9. Incropera F.P., and DeWitt D.P. Fundamentals of Heat and Mass Transfer (2002), John Wiley & Sons, New York p. 240
10. Lalinský T., Držík M., Chlpík J., Krnáč M., Haščík S., Mozolová Z., and Kostič I. Thermo-mechanical characterization of micromachined GaAs based thermal converter using contactless optical methods. Sens. Actuat. A 123-124 (2005) 99-105