A new magnetically actuated switch for precise position detection

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 861-864

  Coutier, C ^a   Chiesi, L ^a   Garnier, A ^c   Fourrier, J C ^a   Lapiere C ^a   Trouillon, M ^a   Grappe, B ^a   Vincent, M ^a   Samperio, A ^a   Borel, S ^b   Dieppedale, C ^b   Lorent, E ^b   Sibuet, H ^b  

^a SCHNEIDER ELECTRIC   (France)

^b CEA LETI   (France)

^c NONE

Author keywords

Magnetic position sensor; MEMS microswitch; Reliability

Indexed keywords

ANALYTICAL MODEL; DRY CONTACT; ELECTRICAL ISOLATION; HIGHLY INTEGRATED; MAGNETIC POSITION SENSOR; MAGNETIC POSITION SENSORS; MEMS TECHNOLOGY; MICROSWITCHES; NEW COMPONENTS; POSITION ACCURACY; POSITION DETECTION; PRECISE POSITION; REAL APPLICATIONS; RELIABILITY TEST;

ACTUATORS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; RELIABILITY; SWITCHES;

SOLID-STATE SENSORS;

EID: 71449122174     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285825     Document Type: Conference Paper

References (3)

1. K. Petersen, "Micromechanical membrane switches on silicon", IBM Journal of Research and Development, 23, no. 4, 1979, pp. 376-385.
2. M. Vincent, L. Chiesi, J.C. Fourrier, A. Garnier, B. Grappe, C. Lapiere, C. Coutier, A. Samperio and S. Paineau, "Electrical contact reliability in magnetic MEMS switch", in Proceedings of the 54th IEEE Holm Conference, Orlando, October 27-29, 2008, pp. 145-150.
3. M. Vincent, L. Chiesi, P. Rousset, C. Lapiere, C. Poulain, L. Carbone, F. Houze and J. Delamare, "An original apparatus for endurance testing of MEMS electrical contact materials", in Proceedings of the 55th IEEE Holm Conference on Electrical Contacts, Vancouver, September 14-16, 2009, to be published.