Ultra-low power metal-oxide gas sensor on plastic foil

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 584-587

  Courbat, J ^a   Briand, D ^a   Yue, L ^b   Raible, S ^b   De Rooij, N F ^a  

^a EPFL   (Switzerland)

^b AppliedSensor GmbH   (Germany)

Author keywords

Drop coated; Foil level packaging; Gas sensor; Low power; Metal oxide; Plastic foil; Polyimide; Readout circuitry

Indexed keywords

COATED FOILS; FOIL LEVEL PACKAGING; GAS SENSORS; LOW POWER; METAL-OXIDE; PLASTIC FOILS; READOUT CIRCUITRY;

ACTUATORS; CHEMICAL SENSORS; GAS DETECTORS; GASES; METALS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; PLASTIC COATINGS; POLYIMIDES;

SOLID-STATE SENSORS;

EID: 71449110546     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285392     Document Type: Conference Paper

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