A multi-terminal pressure sensor with enhanced sensitivity

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 1122-1125

  Coraucci, Guilherme O ^a   Finardi, M R ^a   Fruett, Fabiano ^a  

^a UNIVERSITY OF CAMPINAS   (Brazil)

Author keywords

CMOS microsystem; High sensitivity; Microelectronic; Piezoresistive effect; Pressure sensor; Short circuit effect

Indexed keywords

CIRCUIT EFFECTS; CMOS MICROSYSTEMS; HIGH SENSITIVITY; PIEZORESISTIVE EFFECT; PIEZORESISTIVE EFFECTS;

ACTUATORS; MICROELECTRONICS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; PRESSURE EFFECTS; PRESSURE SENSORS; PRESSURE TRANSDUCERS;

SOLID-STATE SENSORS;

EID: 71449106583     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285927     Document Type: Conference Paper

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