The magnetic calibration of arbitrarily shaped Hall sensors in the absence of magnetic fields

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 881-884

  Cornils, M ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Calibration; Conformal mapping; Hall sensors; Magnetic sensitivity; Sensor optimization

Indexed keywords

CMOS SENSORS; DEVICE GEOMETRIES; ELECTRICAL CONDUCTION; EXPERIMENTAL DATA; HALL PLATES; HALL SENSOR; MAGNETIC EFFECTS; MAGNETIC SENSITIVITY; NUMERICAL SIMULATION; PERPENDICULAR MAGNETIC FIELDS; PRIOR KNOWLEDGE; RESISTANCE VALUES; SENSOR OPTIMIZATION;

ACTUATORS; CALIBRATION; COMPUTER SIMULATION; CONFORMAL MAPPING; FIBER OPTIC SENSORS; GALVANOMAGNETIC EFFECTS; HALL EFFECT TRANSDUCERS; HALL MOBILITY; MAGNETIC FIELDS; MAGNETIC MATERIALS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS;

SOLID-STATE SENSORS;

EID: 71449101602     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285858     Document Type: Conference Paper

References (8)

1. nd ed., Institute of Physics Publishing, Bristol, 2004.
2. R. Steiner, A. Haeberli, F.-P. Steiner, C. Maier, and H. Baltes, "Offset reduction in Hall devices by continuous spinning current", Sens. Actuators A, vol. 66, pp. 167-172, 1998.
3. M. Cornils and O. Paul, "The magnetic calibration and optimization of symmetric Hall plates may be accomplished even in the absence of a magnetic field", in Techn. Digest MEMS'08 Conference, Tucson, January 13-17, 2008, pp. 940-943.
4. th ed., Springer-Verlag, New York, 1999.
5. M. Cornils and O. Paul, "Beyond van der Pauw: sheet resistance determination from arbitrarily shaped planar four-terminal devices with extended contacts", in Proc. ICMTS'08 Conference, Edinburgh, March 24-27, 2008, pp. 23-28.
6. st ed., Cambridge University Press, 2002.
7. M. Cornils and O. Paul, "Sheet resistance determination of electrically symmetric planar four-terminal devices with extended contacts", J. Appl. Phys, vol. 104, pp. 024503/1-024503/10, 2008.
8. L. J. Van Der Pauw, "A method of measuring specific resistivity and Hall effect of discs of arbitrary shape", Philips Res. Rep., vol. 13, no. 1, pp. 1-9, 1958.