The magnetic calibration and optimization of symmetric hall plates may be accomplished even in the absence of a magnetic field

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 940-943

  Cornils, M ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; MAGNETIC FIELD MEASUREMENT; MAGNETIC FIELDS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; PHOTORESISTS; REACTIVE ION ETCHING;

HALL PLATES; INTERNATIONAL CONFERENCES; MAGNETIC SENSITIVITY; MICRO-ELECTRO MECHANICAL SYSTEMS; PERPENDICULAR MAGNETIC FIELDS; RESISTANCE MEASUREMENTS;

MAGNETIC MATERIALS;

EID: 50149117971     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443812     Document Type: Conference Paper

References (6)

1. R. S. Popovic, "Hall-Effect Devices", Sens. Actuators, vol. 17, no. 1, pp. 39-53, 1989.
2. R. Steiner, A. Haeberli, F.-P. Steiner, C. Maier, and H. Baltes, "Offset Reduction in Hall Devices by Continuous Spinning Current", Sens. Actuators A, vol. 66, pp. 167-172, 1998.
3. th ed., Springer-Verlag, New York 1999, ChaptersVII and X.
4. st ed., Cambridge University Press 2002.
5. M. Cornils and O. Paul, "Sheet Resistance Determination of Electrically Symmetric Planar Four-Terminal Devices with Extended Contacts", to be submitted to J. Appl. Phys.
6. L. J. Van Der Pauw, "A Method of Measuring Specific Resistivity and Hall Effect of Discs of Arbitrary Shape", Philips Res. Rep., vol. 13, no. 1, pp. 1-9, 1958.