Design and implementation of liquid droplet based motion sensing

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 680-683

  Zeng, H ^a   Zhao, Yi ^a  

^a The Ohio State University   (United States)

Author keywords

Biocompatibility; Droplet dynamics; Frequency response; Motion sensing

Indexed keywords

BINARY SIGNALS; DIELECTRIC SUBSTRATES; DROPLET DYNAMICS; ELECTRICAL SIGNAL; LIQUID DROPLETS; LUMPED PARAMETER MODELS; MICROELECTRODES ARRAYS; MOTION SENSING; PROOF MASS; SENSING SYSTEMS;

ACTUATORS; BIOCOMPATIBILITY; DIELECTRIC MATERIALS; DROP FORMATION; IONIZATION OF LIQUIDS; LIQUIDS; MICROELECTRODES; MICROMACHINING; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; SOLID-STATE SENSORS; SURFACE DEFECTS;

FREQUENCY RESPONSE;

EID: 71449100527     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285416     Document Type: Conference Paper

References (7)

1. M. Tanaka, "An industrial and applied review of new MEMS devices features," Microelectron Eng, vol. 84, pp. 1341-1344, 2007.
2. J. K. R. Aaron Patridge, Benjamin W, Chui, Eugene M. Chow, Alissa M. Fitzgerald, Lian Zhang, Nadim I. Maluf, Thomas w. Kenny, "A High-Performance Planar Piezoresistive Accelerometer," J Microelectromech S, vol. 9, pp. 58-66, 2000.
3. L. Tang, K. Zhang, S. Chen, G. Zhang, and G. Liu, "MEMS inclinometer based on a novel piezoresistor structure," Microelectron J, vol. 40, pp. 78-82, 2009.
4. P. Dong, X. Li, H. Yang, H. Bao, W. Zhou, S. Li, and S. Feng, "High-performance monolithic triaxial piezoresistive shock accelerometers," Sensor Actuat-Phys, vol. 141, pp. 339-346, 2008.
5. L. M. Nashner, "Vestibular postural control model," Bio Cybern, vol. 10, pp. 106-110, 1972.
6. C. H. J. F. John K. Coultate, Stewart McWilliam, Alan R. Malvern, "Application of optimal and robust design methods to a MEMS accelerometer," Sensor Actuat A-Phys, vol. 142, pp. 88-96, 2008.
7. 2," Langmuir, vol. 21, pp. 12213-12217, 2005.