A flexible tactile sensing array based on novel capacitance mechanism

TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2009, Pages 2182-2185

  Cheng, Ming Yuan ^a   Liao, B T ^a   Huang, X H ^a   Yang, Y J ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Artificial skin; Capacitive; Flexible; PDMS; Tactile

Indexed keywords

ARTIFICIAL SKIN; CAPACITOR STRUCTURES; DIFFERENT SIZES; ELECTRICAL PROPERTY; FABRICATION PROCESS; FLEXIBLE PRINTED CIRCUIT BOARDS; MICROMACHINED; SENSING ELECTRODE; SENSING ELEMENTS; TACTILE IMAGES; TACTILE SENSING; TACTILE SENSING ARRAYS;

ACTUATORS; CAPACITANCE; MICROCHANNELS; MICROSYSTEMS; PIEZOELECTRIC TRANSDUCERS; PRINTED CIRCUIT BOARDS; PRINTED CIRCUIT MANUFACTURE; ROBOT APPLICATIONS; SILICONES; SKIN;

SOLID-STATE SENSORS;

EID: 71449088715     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2009.5285609     Document Type: Conference Paper

References (9)

1. B. J. Kane, M. R. Cutkosky, and G. T. A. Kovacs, "A traction stress sensor array for use in high-resolution robotic tactile imaging," Journal of Microelectromechanical Systems, vol. 9, pp. 425-434, Dec 2000.
2. L. Wang and D. J. Beebe, "A silicon-based shear force sensor: development and characterization," Sensors and Actuators a-Physical, vol. 84, pp. 33-44, Aug 2000.
3. M.-Y. Cheng, C.-M. Tsao, Y.-T. Lai, Y.-J. Yang, " A novel highly-twistable tactile sensing array using extendable spiral electrodes," Proceedings of IEEE MEMS'09, 92-95, 2009.
4. O. Kerpa, K. Weiss, and H. Worn, "Development of a Flexible Tactile Sensor System for a Humanoid Robot," IEEE International Conference on Intelligent Robots and Systems, pp. 1-6, 2003.
5. Y. J. Yang, M. Y. Cheng, W. Y. Chang, L. C. Tsao, S. A. Yang, W. P. Shih, E. Y. Chang, S. H. Chang, and K. C. Fan, "An integrated flexible temperature and tactile sensing array using PI-copper films," Sensors and Actuators a-Physical, vol. 143, pp. 143-153, May 2008.
6. Y. Hasegawa, M. Shikida, D. Ogura, and K. Sato, Novel type of fabric tactile sensor made from artificial hollow fiber, Proceedings of IEEE MEMS'07, 603-606, 2007.
7. N. Chen, J. Engel, S. Pandya, and C. Liu, "Flexible skin with two-axis bending capability made using weaving-by-lithography fabrication method," Proceedings of IEEE MEMS'06, pp. 330-333, 2006.
8. M. Sergio, N. Manaresi, M. Tartagni, R. Guerrieri, and R. Canegallo, "A Textile Based Capacitive Pressure Sensor," Proceedings of IEEE Sensors pp. 1625-1630, 2002.
9. H. K. Lee, S. I. Chang, and E. Yoon, "A flexible polymer tactile sensor: Fabrication and modular expandability for large area deployment," Journal of Microelectromechanical Systems, vol. 15, pp. 1681-1686, Dec 2006.