Fabrication of microfluidic devices for packaging CMOS MEMS impedance sensors

Microfluidics and Nanofluidics

Volumn 7, Issue 6, 2009, Pages 869-875

  Jang, Ling Sheng ^a   Wu, Chun Ching ^a   Liu, Chia Feng ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

CMOS MEMS; Impedance; Microfluidics; Package; PDMS

Indexed keywords

BONDING STRENGTH; CMOS-MEMS; IMPEDANCE MEASUREMENT; IMPEDANCE SENSORS; INJECTION SPEED; MICRO-FLUIDIC DEVICES; MICROFLUIDICS PACKAGES; PDMS SUBSTRATE; PHOSPHATE-BUFFERED SALINES; POLYDIMETHYLSILOXANE PDMS; SHORT CIRCUIT TESTS;

FLUIDIC DEVICES; MEMS; MICROCHANNELS; PACKAGING; SALINE WATER; SENSORS; SILICONES;

MICROFLUIDICS;

EID: 71249085149     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-009-0484-8     Document Type: Article

References (22)

1. N Bowden S Brittain AG Evans JW Hutchinson GW Whitesides 1998 Spontaneous formation of ordered structures in thin films of metals supported on an elastomeric polymer Nature 393 146 149 10.1038/30193 (Pubitemid 28242249)
2. SG Charati SA Stern 1998 Diffusion of gases in silicone polymers: Molecular dynamics simulations Macromolecules 31 5529 5535 10.1021/ma980387e
3. Chong SC, Xie L (2005) Disposable polydimethylsioxane package for bio-microfluidic system. In: Electronic components and technology conference, pp 617-621 (Pubitemid 41276238)
4. MA Eddings MA Johnson BK Gale 2008 Determining the optimal PDMS-PDMS bonding technique for microfluidic devices J Micromech Microeng 18 1 4 10.1088/0960-1317/18/6/067001 (Pubitemid 351591396)
5. M Elwenspoek TSJ Lammerink R Miyake JHJ Fluitman 1994 Towards integrated microliquid handing systems J Micromech Microeng 4 227 245 10.1088/0960-1317/4/ 4/008
6. D Erickson D Li 2004 Integrated microfluidic devices Anal Chim 507 11 26 10.1016/j.aca.2003.09.019 (Pubitemid 38224086)
7. A Folch M Toner 1998 Cellular micropatterns on biocompatible materials Biotechnol Prog 14 388 392 10.1021/bp980037b (Pubitemid 28278819)
8. E Ghafar-Zadeh M Sawan D Therriault 2008 A 0.18-μm CMOS capacitive sensor lab-on-chip Sens Actuators A(141) 454 462 10.1016/j.sna.2007.10.007
9. P Gravesen J Brandebjerg OS Jensen 1993 Microfluidics-a review J Micromech Microeng 3 168 182 10.1088/0960-1317/3/4/002
10. R Huang Z Suo 2002 Wrinkling of a compressed elastic film on a viscous layer Appl Phys 91 1135 1142 10.1063/1.1427407 (Pubitemid 34148766)
11. LS Jang WH Kan 2007 Peristaltic piezoelectric micropump system for biomedical applications Biomed Microdevices 9 4 619 626 10.1007/s10544-007-9075- 1
12. LS Jang MH Wang 2007 Microfluidic device for cell capture and impedance measurement Biomed Microdevices 9 734 742
13. LS Jang SH Chao MR Holl DR Meldrum 2007 Resonant mode-hopping micromixing Sens Actuators A 138 179 186 10.1016/j.sna.2007.04.052 (Pubitemid 47002252)
14. J Kim HH Lee 2001 Wave formation by heating in thin metal film on an elastomer J Polym Sci B Polym Phys 39 1122 1128 10.1002/polb.1088 (Pubitemid 32508430)
15. SP Lacour S Wagner 2003 Stretchable gold conductors on elastomeric substrates Appl Phys Lett 82 15 2404 2406 10.1063/1.1565683
16. H Lee Y Liu D Ham RM Westervelt 2007 Integrated cell manipulation system-CMOS/microfluidic hybrid Lab Chip 7 331 337 10.1039/b700373k (Pubitemid 46348323)
17. V Linder E Verpoorte W Thormann NF de Rooij H Sigrist 2001 Surface biopassivation of replicated poly(dimethylsiloxane) microfluidic channels and application to heterogeneous immunoreaction with on-chip fluorescence detection Anal Chem 73 4181 4189 10.1021/ac010421e (Pubitemid 32830857)
18. NT Nguyen S Schubert S Richter W Dotzel 1998 Hybrid-assembled micro dosing system using silicon-based micropump/valve and mass flow sensor Sens Actuators A 69 85 91 10.1016/S0924-4247(98)00039-9
19. M Niklaus S Rosset M Dadras P Dubois H Shea 2008 Microstructure of 5 keV gold-implanted polydimethylsiloxane Scripta Mater 59 893 896 10.1016/j.scriptamat.2008.06.038
20. ZC Peng ZG Ling M Tondra CG Liu M Zhang K Lian J Goettert J Hormes 2006 CMOS compatible integration of three-dimensional microfluidic systems based on low-temperature transfer of SU-8 Films J Microelectromech Syst 15 3 708 716 10.1109/JMEMS.2006.876793 (Pubitemid 43891365)
21. V Saarela S Franssila S Tuomikoski S Marttila P Ostman T Sikanen T Kotiaho R Kostiainen 2006 Re-usable multi-inlet PDMS fluidic connector Sens Actuators B(114) 552 557
22. Y Xu B Li J Li E Wang 2008 Ionic liquids supported growth of highly ordered microdroplets induced by fluidic leakage at poly(dimethylsiloxane) interfaces Anal Chim Acta 625 35 40 10.1016/j.aca.2008.07.009