Pirani gauge based hermeticity monitoring for un-cooled micro bolometer array

Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 2009, Pages 438-442

  Tao, Dong ^a   Bin, Xiao ^a   Anders, Elfving ^b   Zhaochu, Yang ^c   Nhut, Tran Minh ^a   Einar, Halvorsen ^a   Nils, Høivik ^a  

^a UNIVERSITY OF SOUTH EASTERN NORWAY   (Norway)

^b SensoNor   (Norway)

^c XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETER ARRAY; FOURIER'S LAW; HERMETICITY; MEMSDEVICES; MICRO-BOLOMETERS; MOLECULAR THEORY; NOVEL METHODS; PIRANI GAUGE; PROCESS FLOWS; SI/GE; THERMAL ANALYSIS; THERMAL CONDUCTANCE; THERMAL INTERACTION; VACUUM ENVIRONMENT;

BOLOMETERS; FUNCTIONAL MATERIALS; GAGES; INFRARED DETECTORS; INTEGRATED CIRCUITS; MEMS; MICROELECTROMECHANICAL DEVICES; QUALITY ASSURANCE; SAFETY FACTOR; THERMOANALYSIS; VACUUM GAGES;

FAILURE ANALYSIS;

EID: 71049149245     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IPFA.2009.5232614     Document Type: Conference Paper

References (10)

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