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Volumn , Issue , 2009, Pages

3D TSV processes and its assembly/packaging technology

Author keywords

[No Author keywords available]

Indexed keywords

3-D INTERCONNECTS; 3D PACKAGING; 3D STACKING; ADVANCED PACKAGING; CHIP STACKING; ELECTRONIC PRODUCT; FABRICATION PROCESS; FORM FACTORS; MATERIALS AND PROCESS; MICRO-BUMPS; OVERALL COSTS; POWER CONSUMPTION; POWER DISSIPATION; PROCESS STEPS; RESEARCH INSTITUTES; SEMICONDUCTOR INDUSTRY; SEMICONDUCTOR MANUFACTURERS; SIGNAL SPEED; THIN WAFERS; THROUGH-SILICON-VIA; ULTRA FINE PITCH;

EID: 70549105980     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/3DIC.2009.5306535     Document Type: Conference Paper
Times cited : (45)

References (7)
  • 1
    • 70549097084 scopus 로고    scopus 로고
    • Hu G., Kalyanam H., Krishnamoorthy and Polka L., Package Technology to Address the Memory Bandwidth Challenge for Tera-scale Computing, IntelTechnology Journal, 11, No. 3 (2007), pp. 197-206.
    • Hu G., Kalyanam H., Krishnamoorthy and Polka L., "Package Technology to Address the Memory Bandwidth Challenge for Tera-scale Computing," IntelTechnology Journal, Vol. 11, No. 3 (2007), pp. 197-206.
  • 2
    • 25844453501 scopus 로고    scopus 로고
    • Development of next generation system-onacage (SOP) technology based on silicon carriers with fine-pitch interconnection
    • Knickerbocker, J. U. et al, "Development of next generation system-onacage (SOP) technology based on silicon carriers with fine-pitch interconnection," IBM J. Res. Dev. Vol. 49, No. 4/5 (2005), pp. 725-754.
    • (2005) IBM J. Res. Dev , vol.49 , Issue.4-5 , pp. 725-754
    • Knickerbocker, J.U.1
  • 5
    • 0036645840 scopus 로고    scopus 로고
    • Temperature influence on etching deep holes with SF6/O2 cryogenic plasma
    • G. Craciun et al, "Temperature influence on etching deep holes with SF6/O2 cryogenic plasma", 2002, Journal of Micromechanics and Microengineering, 12, pp 390-394.
    • (2002) Journal of Micromechanics and Microengineering , vol.12 , pp. 390-394
    • Craciun, G.1
  • 6
    • 29144435323 scopus 로고    scopus 로고
    • Deep micro hole drilling in a silicon substrate pusing multi-bursts of nanosecond UV laser pulses
    • B Tan, "Deep micro hole drilling in a silicon substrate pusing multi-bursts of nanosecond UV laser pulses", 2006, Journal of Micromechanics and Microenginering, Volume 16, pp 109-112.
    • (2006) Journal of Micromechanics and Microenginering , vol.16 , pp. 109-112
    • Tan, B.1
  • 7
    • 0033692666 scopus 로고    scopus 로고
    • Wensink. H et al, High resolution powder blast micromachining , Micro Electro Mechanical Systems, 2000(MEMS-2000), Issue 23-27, Jan 2000, pp 769 - 774.
    • Wensink. H et al, "High resolution powder blast micromachining" , Micro Electro Mechanical Systems, 2000(MEMS-2000), Volume, Issue 23-27, Jan 2000, pp 769 - 774.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.