Application of hydrogel-coated microcantilevers as sensing elements for pH

Journal of Micromechanics and Microengineering

Volumn 19, Issue 12, 2009, Pages

  Gonska, Julian ^a   Schelling, Christoph ^a   Urban, Gerald ^b  

^a ROBERT BOSCH GMBH   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

2-(DIMETHYLAMINO)ETHYL METHACRYLATE; 2-HYDROXYETHYL METHACRYLATE; CANTILEVER BASED SENSORS; INSITU STRESS; MICRO-CANTILEVERS; MULTI-LAYERED; OUTPUT SIGNAL; PH VALUE; PIEZO-RESISTORS; POLY-CRYSTALLINE SILICON; SENSING ELEMENTS; SENSOR ELEMENTS; STATIC DEFLECTIONS; SUBMICRON; THEORETICAL MODELS; VOLUME CHANGE; WHEATSTONE BRIDGES;

ATOMIC FORCE MICROSCOPY; BRIDGE CIRCUITS; CABLE STAYED BRIDGES; HYDROGELS; PH EFFECTS; POLYSILICON; SENSORS; SILICON COMPOUNDS; SILICON OXIDES;

NANOCANTILEVERS;

EID: 70450181423     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/12/127002     Document Type: Article

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