Synthesis of phosphorus-carbide thin films by magnetron sputtering

Physica Status Solidi - Rapid Research Letters

Volumn 2, Issue 4, 2008, Pages 191-193

  Furlan, A ^a   Gueorguiev, G K ^a   Czigany Zs ^b   Hogberg H ^a   Braun, S ^a   Stafstrom S ^a   Hultman, L ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS STRUCTURES; ELASTIC RECOVERY; GRAPHENE PLANE; SHORT RANGE ORDERS;

AMORPHOUS MATERIALS; CARBIDES; GRAPHITE; MAGNETRONS; PHOSPHORUS; SYNTHESIS (CHEMICAL); THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 70449625494     PISSN: 18626254     EISSN: 18626270     Source Type: Journal    
DOI: 10.1002/pssr.200802077     Document Type: Article

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