Comparison of multilayer laser scribing of thin film solar cells with femto, pico and nanosecond pulse durations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7409, Issue , 2009, Pages

  Kim, Tai Wook ^a   Pahk, Heui Jae ^b   Park, Hee K ^c   Hwang, David J ^d   Grigoropoulos, Costas P ^d  

^a Seoul National University   (South Korea)

^b BSNU Precision Co Ltd   (South Korea)

^c AppliFlex LLC   (United States)

^d UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Amorphous silicon; CIS; Laser scribing; Thin films solar cells; Ultrashort laser ablation

Indexed keywords

AFM; AMORPHOUS SILICON (A-SI); CHEMICAL SPECIES; CONDUCTIVE AFM; COPPER INDIUM DISELENIDE; ELECTRICAL CONDUCTANCE; ENERGY DISPERSIVE X RAY SPECTROSCOPY; EXPERIMENTAL STUDIES; FEMTOSECONDS; INTER-DIFFUSION; LASER ILLUMINATION; LASER SCRIBING; LASER WAVELENGTH; MULTILAYER STRUCTURES; NANOSECOND PULSE; OPTIMUM LASER PARAMETERS; PICOSECONDS; PLASMA FORMATIONS; PULSE ENERGIES; PULSE WIDTH; REPETITION RATE; SCANNING SPEED; SEM; SHORT-PULSED LASER; THERMAL DAMAGE; THIN FILM SOLAR CELLS; THIN FILMS SOLAR CELLS; ULTRA-SHORT LASER ABLATION; UNDERLYING LAYERS;

AMORPHOUS FILMS; AMORPHOUS SILICON; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; DEBRIS; FILM PREPARATION; INDIUM; LASER ABLATION; LASER PULSES; LASERS; MOLTEN MATERIALS; MULTILAYERS; PULSED LASER DEPOSITION; SCANNING ELECTRON MICROSCOPY; SELENIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SOLAR CELLS; THIN FILM DEVICES;

PULSED LASER APPLICATIONS;

EID: 70449625396     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.826458     Document Type: Conference Paper

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