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Volumn 1139, Issue , 2009, Pages 217-223

Micro tensile tests on aluminium thin films: Tensile device and in-situ observations

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ELASTIC MODULI; FINITE ELEMENT METHOD; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MEMS; MICROELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY; STRAIN; STRESS-STRAIN CURVES; TRANSMISSION ELECTRON MICROSCOPY;

EID: 70449590052     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (4)

References (15)
  • 4
    • 61449093067 scopus 로고    scopus 로고
    • Stresses and mechanical stability of CVD thin films
    • Chapter 3, Ed. J.H. Park. ASM International
    • M. Ignat, "Stresses and mechanical stability of CVD thin films" Chapter 3 in Surface Engineering Series Ed. J.H. Park. ASM International Series Vol. 2, (2001) pp. 45-80
    • (2001) Surface Engineering Series , vol.2 , pp. 45-80
    • Ignat, M.1
  • 5
    • 70449584413 scopus 로고    scopus 로고
    • M. Ignat. Key Eng. Mat., Vol. 116-117,. 290 (1996)
    • (1996) Key Eng. Mat , vol.116-117 , pp. 290
    • Ignat, M.1
  • 7
    • 50049114963 scopus 로고    scopus 로고
    • C. Malhaire, M. Ignat, K. Dogeche, S. Brida, C. Josserond and L. Debove. Proceedings of Transducers'07 and Eurosensors XXI, Symp. 2. 1, 623, (2007)
    • C. Malhaire, M. Ignat, K. Dogeche, S. Brida, C. Josserond and L. Debove. Proceedings of Transducers'07 and Eurosensors XXI, Symp. 2. Vol. 1, 623, (2007)
  • 10
    • 70449597125 scopus 로고    scopus 로고
    • G. Cornella Monotonic and cyclic testing of film materials for MEMS applications PhD, Stanford University (1999).
    • G. Cornella "Monotonic and cyclic testing of film materials for MEMS applications" PhD, Stanford University (1999).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.