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Volumn 1112, Issue , 2009, Pages 33-41

Scalability and low cost of ownership advantages of direct bond interconnect (DBI®) as drivers for volume commercialization of 3-d integration architectures and applications

Author keywords

[No Author keywords available]

Indexed keywords

3-D INTEGRATED CIRCUIT; 3-D INTEGRATION; DIRECT BOND; HETEROGENEOUS MATERIALS; HIGH-THROUGHPUT; LOW COSTS; LOW THERMAL BUDGET;

EID: 70449587205     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (16)

References (24)
  • 6
    • 84878197847 scopus 로고    scopus 로고
    • High Density Direct Bond Interconnect Technology for Three Dimensional Integrated Circuit Applications
    • P. Enquist, "High Density Direct Bond Interconnect Technology for Three Dimensional Integrated Circuit Applications", Fall MRS 2006.
    • (2006) Fall MRS
    • Enquist, P.1
  • 8
    • 23844447366 scopus 로고    scopus 로고
    • Wafer Level 3D Interconnects Via Cu Bonding
    • P. Morrow et al., "Wafer Level 3D Interconnects Via Cu Bonding", Adv. Metals Conf, 2004.
    • (2004) Adv. Metals Conf
    • Morrow, P.1
  • 9
    • 21844469252 scopus 로고    scopus 로고
    • Roadmap for CMOS image sensors: Moore meets Planck and Sommerfeld
    • P. B. Catrysse, B. A. Wandell "Roadmap for CMOS image sensors: Moore meets Planck and Sommerfeld", 2005 SPIE and 1S&T, vol. 5678.
    • (2005) SPIE and 1S&T , vol.5678
    • Catrysse, P.B.1    Wandell, B.A.2
  • 10
    • 70449595393 scopus 로고    scopus 로고
    • http://www.3d-ic.org/standards.html
  • 11
    • 70549086065 scopus 로고    scopus 로고
    • Direct Bond Interconnect Slashes Large-Die SOC Manufacturing Costs
    • P. Enquist, "Direct Bond Interconnect Slashes Large-Die SOC Manufacturing Costs", FSA forum, Fall 2006, pi2.
    • FSA forum, Fall 2006, pi2
    • Enquist, P.1
  • 13
    • 28244483324 scopus 로고    scopus 로고
    • Room Temperature Direct Wafer Bonding for Three Dimensional Integrated Sensors
    • P. Enquist, "Room Temperature Direct Wafer Bonding for Three Dimensional Integrated Sensors", Sensors and Materials, Vol. 17, No. 6 (2005), p. 307.
    • (2005) Sensors and Materials , vol.17 , Issue.6 , pp. 307
    • Enquist, P.1
  • 16
    • 70449606200 scopus 로고    scopus 로고
    • US patent 7,109,092, September
    • Q.-Y. Tong, US patent 7,109,092, September 2006.
    • (2006)
    • Tong, Q.-Y.1
  • 18
    • 70449616335 scopus 로고    scopus 로고
    • US patent 7,335,996, February
    • Q.-Y. Tong, US patent 7,335,996, February 2008.
    • (2008)
    • Tong, Q.-Y.1
  • 21
    • 33750697638 scopus 로고    scopus 로고
    • Room Temperature Metal Direct Bonding
    • Q. Y. Tong, "Room Temperature Metal Direct Bonding", Applied Physics Letters, 89, 1 (2006).
    • (2006) Applied Physics Letters , vol.89 , pp. 1
    • Tong, Q.Y.1
  • 22
    • 70449619464 scopus 로고    scopus 로고
    • Yole Développement, 3D1C Report, 2007 Edition, Revised August 15, 2008.
    • Yole Développement, "3D1C Report", 2007 Edition, Revised August 15, 2008.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.