Lead zirconium titanate thin films prepared by thermal annealing of multilayer structures composed of PbO, ZrO2 and TiO2

Journal of Industrial and Engineering Chemistry

Volumn 15, Issue 5, 2009, Pages 694-698

  Kang, Byung Sun ^a   Lee, Won Gyu ^a  

^a Kangwon National University   (South Korea)

Author keywords

MOCVD; Multilayer structure; PZT; Thermal interdiffusion

Indexed keywords

EID: 70449525493     PISSN: 1226086X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jiec.2009.09.047     Document Type: Article

References (22)

1. Krupanidhi S.B., Maffei N., Sayer M., and El-Assal K. J. Appl. Phys. 54 (1983) 6601
2. Fukami T., Minemura I., Hiroshima Y., and Osada T. Jpn. J. Appl. Phys. 30 (1991) 2155
3. Ryder Jr. D.F., and Raman N.K. J. Electron. Mater. 21 (1992) 971
4. Chen Z., Zeng Y., Yang C., and Yang B. Mater. Sci. Eng. B 94 (2002) 229
5. Takahashi Y., and Yamaguchi K. J. Mater. Sci. 25 (1990) 3950
6. Tuttle B.A., Headley T.J., Bunker B.C., Schwartz R.W., Zender T.J., Hernandez C.L., Goodnow D.C., Tissot R.J., Michael J., and Carim A.H. J. Mater. Res. 7 (1992) 1876
7. Peng C.H., and Desu S.B. Appl. Phys. Lett. 61 (1992) 16
8. Choi J.H., and Kim H.G. J. Appl. Phys. 74 (1993) 6413
9. Lee W.G., and Kwon Y.J. J. Ind. Eng. Chem. 14 (2008) 89
10. Jaffe B., Cook W.R., and Jaffe H. Piezoelectric Ceramics (1971), Academic Press, London
11. Murarka S.P. Silicides for VLSI Applications (1982), Academic Press, New York
12. Iijima T., He G., and Funakubo H. J. Crystal Growth 236 (2002) 248
13. Lee W.G., and Woo S.I. J. Ind. Eng. Chem. 10 (2004) 379
14. Song B.Y., Kwon Y.J., and Lee W.G. Korean Chem. Eng. Res. 45 (2007) 378
15. Holman R., and Fulrath R. J. Am. Ceram. Soc. 55 (1981) 105
16. Kakegawa K., and Mohri J. Solid State Commun. 24 (1989) 769
17. Nieminen M., Lehto S., and Niinistö L. J. Mater. Chem. 11 (2001) 3148
18. Saha S., and Agrawal D. Am. Ceram. Bull. 71 (1992) 1424
19. Tabata H., Kawai T., Kaeai S., Murata O., Fujoka J., and Minakata S. Appl. Phys. Lett. 59 (1991) 2354
20. Lee W.G., and Woo S.I. Integar. Ferroelectr. 5 (1994) 107
21. Arlt G., Henning D., and de With G. J. Appl. Phys. 58 (1985) 1619
22. Seoand K.W., and Cho S.H. J. Ind. Eng. Chem. 7 (2001) 87