High frequency lamb wave resonator using LiNbO3 thin film by CVD

2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time Forum

Volumn , Issue , 2009, Pages 75-78

  Kadota, Michio ^a   Ogami, Takashi ^a   Yamamoto, Kansho ^a   Tochishita, Hikari ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

4.5GHz; CVD; Lamb wave; LiNbO3 film; Resonator; Twin epitaxial

Indexed keywords

4.5GHZ; CVD; LAMB WAVE; LINBO3 FILM; TWIN EPITAXIAL;

ACOUSTIC IMPEDANCE; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTICS; RESONATORS; SUBSTRATES; ULTRASONIC TRANSDUCERS; ULTRASONIC WAVES; VELOCITY; WAVE PROPAGATION;

CHEMICAL VAPOR DEPOSITION;

EID: 70449495675     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2009.5168145     Document Type: Conference Paper

References (11)

1. M. Kadota: Jpn. J. Appl. Phys., vol, No44, No.6B, p.4285(2005).
2. M. Hara, T. Yokoyama, M. Ueda, and Y. Satoh: Proc. IEEE Ultrason. Symp., p.1152(2007).
3. H. Nakahata, A. Hachigo, K. Itakuma, and S. Shikata : Proc. IEEE Ultrason. Symp. p.349(2000).
4. H. Odagawa and K. Yamanouchi : Proc. IEEE Ultrason. Symp. p.103(1998).
5. Y. Nakagawa, M. Momose and S. Kakio: Jpn. J. Appl. Phys. 46, p.4665(2007).
6. K. Mizutani and K. Toda: Trans. IEICE Japan, vol. J68-A, p.496(1985)[in Japanese].
7. K. Toda and K. Mizutani: Trans. IEICE Japan, J71-A, p.1225(1988)[in Japanese]
8. A. Tanaka, M. Koike, F. Saito, K. Hashimoto and M. Yamaguchi: Tech. Rep. of IEICE Japan, US91-89 p.17(1992) [in Japanese].
9. N. Tirole, A. Choujaa, D. Hauden, G. Martinm, P. Blind, M. Froelicher, J. C. Pommier, and A. Cachard: Proc. IEEE Ultrason. Symp., p.371(1993).
10. V. Yantchev and I. Katardjiev : Proc. IEEE Ultrason. Symp. p.1580(2005).
11. S. Kazuta, Y. Cho, and M. Kadota: Jpn. J. Appl. Phys. 39, p.3121(2000).