Thinned charge coupled devices with flat focal planes for UV imaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3965, Issue , 2000, Pages 148-156

  Jones, Todd J ^a   Deelman, Peter W ^a   Elliott, S Tom ^a   Grunthaner, P J ^a   Wilson, R ^a   Nikzad, Shouleh ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; CHARGE COUPLED DEVICES; GOLD; SEMICONDUCTOR DOPING; SILICON SENSORS; ULTRAVIOLET DETECTORS;

DELTA DOPING; DIFFUSION BONDING; THERMOCOMPRESSION BONDING; ULTRAVIOLET IMAGING;

IMAGE SENSORS;

EID: 0033714697     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)