Digital multiple wavelength phase shifting algorithm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7432, Issue , 2009, Pages

  Zhang, Song ^a  

^a Iowa State University of Science and Technology   (United States)

Author keywords

3D shape measurement; Multiple wavelength; Phase shifting; Step height

Indexed keywords

3D SHAPE MEASUREMENT; LOW NOISE; MULTIPLE OBJECTS; MULTIPLE WAVELENGTH; MULTIPLE WAVELENGTHS; PHASE SHIFTED; PHASE SHIFTING; PHASE UNWRAPPING; SHORTER WAVELENGTH; STEP HEIGHT; THREE-DIMENSIONAL SHAPE MEASUREMENT; WAVELENGTH PHASE-SHIFTING;

ABERRATIONS; OPTICAL TESTING; PHASE SHIFT; PIXELS; WAVELENGTH;

THREE DIMENSIONAL;

EID: 70449410021     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.823903     Document Type: Conference Paper

References (26)

1. Malacara, D., ed., Optical Shop Testing, John Wiley and Songs, New York, 2007.
2. Ghiglia, D. C. and Pritt, M. D., Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software, John Wiley and Sons, Inc, 1998.
3. Creath, K., "Step height measurement using two-wavelength phase-shifting interferometry," Appl. Opt. 26, pp. 2810-2816, 1987.
4. Polhemus, C., "Two-wavelength interferometry," Appl. Opt. 12, pp. 2071-2074, 1973.
5. Cheng, Y.-Y. and Wyant, J. C., "Two-wavelength phase shifting interferometry," Appl. Opt. 23, pp. 4539-4543, 1984.
6. Onodera, R. and Ishii, Y., "Two-wavelength interferometry that uses a fourier-transform method," Appl. Opt. 37, pp. 7988-7994, 1998.
7. Cheng, Y.-Y. and Wyant, J. C., "Multiple-wavelength phase shifting interferometry," Appl. Opt. 24, pp. 804-807, 1985.
8. Decker, J. E., Miles, J. R., Madej, A. A., Siemsen, R. F., Siemsen, K. J., Bonth, S., Bustraan, K., Temple, S., and Pekel-sky, J. R., "Increasing the range of unambiguity in step-height measurement with multiple-wavelength interferometry-application to absolute long gauge block measurement," Appl. Opt. 42, pp. 5670-5678, 2003.
9. Mehta, D. S., Dubey, S. K., Shakher, C., and Takeda, M., "Two-wavelength talbot effect and its application for three-dimensional step-height measurement," Appl. Opt. 45, pp. 7602-7609, 2006.
10. Roy, M., Sheppard, C. J. R., Cox, G., and Hariharan, P., "White-light interference microscopy: a way to obtain high lateral resolution over an extended range of heights," Opt. Express 14, pp. 6788-6793, 2006.
11. Warnasooriya, N. and Kim, M. K., "Led-based multi-wavelength phase imaging interference microscopy," Opt. Express 15, pp. 9239-9247, 2007.
12. Huntley, J. M. and Saldner, H. O., "Temporal phase-unwrapping algorithm for automated interferogram analysis," Appl. Opt. 32, pp. 3047-3052, 1993.
13. Saldner, H. O. and Huntley, J. M., "Temporal phase unwrapping: Application to surface profiling of discontinuous objects," Appl. Opt. 36, pp. 2770-2775, 1997.
14. Zhang, H., Chen, W., and Tan, Y., "Phase-unwrapping algorithm for the measurement of three-dimensional object shapes," Appl. Opt. 33, pp. 4497-4500, 1994.
15. Saldner, H. O. and Huntley, J. M., "Profilometry by temporal phase unwrapping and spatial light modulator-based fringe projector," Opt. Eng. 36, pp. 610-615, 1997.
16. Huntley, J. M. and Saldner, H. O., "Shape measurement by temporal phase unwrapping: Comparison of unwrapping algorithms," Meas. Sic. Technol. 8, pp. 986-992, 1997.
17. Towers, D. P., Jones, J. D. C., and Towers, C. E., "Optimum frequency selection in multi-frequency interferometry," Opt. Lett. 28, pp. 1-3, 2003.
18. Towers, C. E., Towers, D. P., and Jones, J. D. C., "Absolute fringe order calculation using optimised multi-frequency selection in full-field profilometry," Opt. Laser Eng. 43, pp. 788-800, 2005.
19. Huang, P. S., Hu, Q., Jin, F., and Chiang, F. P., "Color-encoded digital fringe projection technique for high-speed three-dimensional surface contouring," Opt. Eng. 38, pp. 1065-1071, 1999.
20. Huang, P. S., Zhang, C., and Chiang, F. P., "High-speed 3-d shape measurement based on digital fringe projection," Opt. Eng. 42, pp. 163-168, 2003.
21. Zhang, S. and Huang, P. S., "High-resolution, real-time three-dimensional shape measurement," Opt. Eng. 45, p. 123601, 2006.
22. Huang, P. S. and Zhang, S., "Fast three-step phase shifting algorithm," Appl. Opt. 45, pp. 5086-5091, 2006.
23. Zhang, S. and Yau, S.-T., "High-resolution, real-time 3d absolute coordinate measurement based on a phase-shifting method," Opt. Express 45, pp. 2644-2649, 2006.
24. Creath, K., Cheng, Y.-Y., and Wyant, J. C., "Contouring aspheric surfaces using two-wavelength phase-shifting inter-ferometry," Opt. Acta 32, pp. 1455-1464, 1985.
25. Zhang, S. and Huang, P. S., "Novel method for structured light system calibration," Opt. Eng. 45, p. 083601, 2006.
26. Zhang, S., Li, X., and Yau, S.-T., "Multilevel quality-guided phase unwrapping algorithm for real-time three-dimensional shape reconstruction," Appl. Opt. 46, pp. 50-57, 2007.