The fabrication and characterisation of piezoelectric actuators for active X-ray optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7448, Issue , 2009, Pages

  Zhang, Dou ^a   Sanmartin, Daniel Rodriguez ^a   Button, Tim W ^a   Meggs, Carl ^a   Atkins, Carolyn ^b   Doel, Peter ^b   Brooks, David ^b   Feldman, Charlotte ^c   Willingale, Richard ^c   Michette, Alan ^d   Pfauntsch, Slawk ^d   Sahraei, Shahin ^d   James, Ady ^e   Dunare, Camelia ^f   Stevenson, Tom ^f   Parkes, William ^f   Smith, Andrew ^g   Wang, Hongchang ^h  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

^b UNIVERSITY COLLEGE LONDON   (United Kingdom)

^c UNIVERSITY OF LEICESTER   (United Kingdom)

^d KING'S COLLEGE LONDON   (United Kingdom)

^e UNIVERSITY COLLEGE LONDON   (United Kingdom)

^f UNIVERSITY OF EDINBURGH   (United Kingdom)

^g DARESBURY LABORATORY   (United Kingdom)

^h DIAMOND LIGHT SOURCE LTD   (United Kingdom)

Author keywords

Active X ray Optics; Micro structured optical arrays; Piezoelectric actuators; PZT; X ray telescopes

Indexed keywords

ACTIVE X; ACTIVE X-RAY OPTICS; ARRAY STRUCTURES; BIOLOGICAL APPLICATIONS; BIRMINGHAM; CHANDRA; CHARACTERISATION; DEEP SILICON ETCHING; DRY AND WET; FEATURE SIZES; LARGE OPTICS; MICRO-STRUCTURED OPTICAL ARRAYS; MIRROR SURFACES; OPTICAL ARRAYS; OPTICAL RESOLUTION; PIEZO-ACTUATORS; PIEZOELECTRIC PROPERTY; PLASTIC PROCESSING; PRECISE CONTROL; PZT; SURFACE FINISHING; THIN SHELLS; UNIMORPH; UNIMORPH ACTUATORS; X RAY TELESCOPE; X-RAY OPTICAL SYSTEMS; X-RAY SOURCES; X-RAY TELESCOPES;

ACOUSTIC FIELDS; CANTILEVER BEAMS; COPYING; FUNCTIONAL MATERIALS; FUNCTIONAL POLYMERS; MIRRORS; OPTICAL TELESCOPES; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; SEMICONDUCTING LEAD COMPOUNDS; SPACECRAFT EQUIPMENT; THREE DIMENSIONAL; X RAY OPTICS; X RAYS;

PIEZOELECTRIC ACTUATORS;

EID: 70449366177     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.826018     Document Type: Conference Paper

References (10)

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