Hydrophobic diamond like carbon film for surface Micromachining

Medziagotyra

Volumn 15, Issue 3, 2009, Pages 196-200

  Lazauskas, Algirdas ^a   Grigaliunas, Viktoras ^a,b   Meškinis, Šarunas ^b   Kopustinskas, Vitoldas ^b   Guobiene, Asta ^b   Gudonyte, Angele ^b   Andrulevičius, Mindaugas ^b   Tamulevičius, Tomas ^b  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

Author keywords

Diamond like carbon (DLC); Microelectromechanical (MEMS) switch; Stiction; Surface micromachining

Indexed keywords

EID: 70350787000     PISSN: 13921320     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (23)

1. Hornbeck, L. J., Nelson, W. E. Bistable Deformable Mirror Device, OSA Technical Digest Series. Spatial Light Modulators and Applications 8 1988: p. 107.
2. Nathanson, H., Newell, W., Wickstrom, R., Davis, J. The Resonant Gate Transistor. IEEE Transactions on Electron Devices ED-14 (3) 1967: pp. 117-133.
3. Trimmer, W. Microrobot and Micromechanical Systems. Sensors and Actuators 19 (3) 1989: pp. 267-287.
4. Madou, M. Fundamentals of Microfabrication. 2nd ed., CRC Press, Boca Raton, 2002.
5. Nagaoka, S. Compact Latching Type Single-mode Fiber Switches Fabricated by a Fiber Micromachining Technique and Their Practical Applications. IEEE Journal of Selected Topics in Quantum Electronics 5 (1) 1999: pp. 36-45.
6. Akiyama, T., Shono, K. Controlled Stepwise Motion in Polysilicon Microstructures. Journal of Microelectro mechanical Systems 2 (3) 1993: pp. 106-110.
7. Comtois, J., Bright, V., Phipps, M. Thermal Microactuators for Surface Micromachining Processes. Proceeding SPIE 2642 1995: pp. 10-21.
8. Chollet, Ed. F. SU-8: Thick Photo-Resist for MEMS, 14 Jan. 2006: http://memscyclopedia.org/su8.html.
9. Ostaševičius, V., Tamulevičius, S., Grigaliunas, V., Kopustinskas, V., Palevičius, A., Gudonyte, A., Daukševičius, R. Design and Fabrication of a Microelectromechanical Switch. Materials Science (Medžiagotyra) 10 (4) 2004: pp. 313-316.
10. Han, H., Ryan, F., McClure, M. Ultra-thin Tetrahedral Amorphous Carbon Film as Slider Overcoat for High Areal Density Magnetic Recording. Surface and Coatings Technology 120-121 1999: pp. 579-584.
11. Gopinathan, N., Robinson, C., Ryan, F. Characterization and Properties of Diamond-like Carbon Films for Magnetic Recording Application. Thin Solid Films 355-356 1999: pp. 401-405.
12. Grischke, M., Hieke, A., Morgenweck, F., Dimigen, H. Variation of the Wettability of DLC-coatings by Network Modification Using Silicon and Oxygen. Diamond and Related Materials 7 1998: pp. 454-458.
13. Kim, J., Lee, K., Kim, K., Sugimura, H., Takai, O., Wu, Y., Inoue, Y. Characteristics and High Water-repellency of a-C:H Films Deposited by Radio Frequency PECVD. Surface and Coatings Technology 162 2003: pp. 135-139.
14. Kim, J., Sugimura, H., Takai, O. Water-repellency of a-C:H films Deposited by Radio Frequency Plasma-enhanced CVD. Vacuum 66 2002: pp. 379-383.
15. Leezenberg, P. B., Johnston, W. H., Tyndall, G. W. Chemical Modification of Sputtered Amorphous-carbon Surfaces. Journal of Applied Physics 89 2001: pp. 3498-3507.
16. Chua, D. H. C., Teo, K. B. K., Tsai, T. H., Milne, W. I., Sheeja, D., Tay, B. K., Schneider, D. Correlation of Surface, Mechanical and Microproperties of Tetrahedral Amorphous Carbon Films Deposited Under Different Magnetic Confinement Conditions. Applied Surface Science 221 2004: pp. 455-466.
17. Tay, B. K., Sheeja, D., Lau, S. P., Guo, J. X. Study of Surface Energy of Tetrahedral Amorphous Carbon Films Modified in Various Gas Plasma. Diamond and Related Materials 12 2003: pp. 2072-2076.
18. Chen, L., Hong, C. F. Surface Tension Studies of (Si, N)- Containing Diamond-like Carbon Films Deposited by Hexamethyldisilazane. Diamond and Related Materials 12 2003: pp 968-973.
19. Meškinis, Š., Kopustnikas, V., Šlapikas, K., Gudaitis, R., Guobiene, A., Tamulevičius, S. Oxygen Ion Beam Etching of Diamond Like Carbon Films. Materials Science (Medžiagotyra) 13 (4) 2007: pp. 282-285.
20. Deshmukh, R. R., Shetty, A. R. Comparison of Surface Energies Using Various Approaches and Their Suitability, Journal of Applied Polymer Science 107 2008: pp. 3707-3717.
21. De Los Santos, H. Introduction to Microelectromechanical Microwave Systems. Second Edition. Norwood, MA, USA: Artech House, Incorporated, 2004: pp. 6-8.
22. Chollet, Ed. F., Liu, H. B. A (Not So) Short Introduction to Microelectromechanical Systems. MicroMachines Centre, School of MAE, Nanyang Technological University, Singapore, version 2.0, 2006-08.
23. Philips Semiconductors, BSN304 N-channel Enhancement Mode Vertical D-MOS Transistor, data sheet, Product specification 2001-11.