Optical emission spectroscopy for simultaneous measurement of plasma electron density and temperature in a low-pressure microwave induced plasma

Physics of Plasmas

Volumn 16, Issue 10, 2009, Pages

  Konjevic N ^a   Jovicevic S ^a   Ivkovic M ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

[No Author keywords available]

Indexed keywords

BOLTZMANN PLOT; ELECTRON DENSITIES; LINE INTENSITIES; LOW PRESSURES; MICROWAVE-INDUCED PLASMAS; PARTIAL LOCAL THERMODYNAMIC EQUILIBRIUM; PLASMA ELECTRON DENSITY; SIMULTANEOUS DETERMINATIONS; SIMULTANEOUS MEASUREMENT; SPECTRAL SERIES;

CARRIER CONCENTRATION; ELECTRIC DISCHARGES; ELECTRON DENSITY MEASUREMENT; ELECTRONS; EMISSION SPECTROSCOPY; LIGHT EMISSION; MICROWAVES; OPTICAL EMISSION SPECTROSCOPY; PHOTORESISTS; PLASMA DIAGNOSTICS; PLASMA WAVES; PLASMAS;

INTEGRATED OPTOELECTRONICS;

EID: 70350759925     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3240325     Document Type: Article

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