Spectroscopic characterization of a neon surface-wave sustained (2.45 GHz) discharge at atmospheric pressure

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 63, Issue 9, 2008, Pages 948-956

  Sainz A ^a   Garcia M C ^a  

^a UNIVERSITY OF CÓRDOBA   (Spain)

Author keywords

Atmospheric pressure; Microwave discharge; Neon; Optical emission spectroscopy

Indexed keywords

ARGON; ATMOSPHERIC PRESSURE; ATMOSPHERIC TEMPERATURE; ATMOSPHERICS; CLIMATOLOGY; DISCHARGE (FLUID MECHANICS); ELECTRIC DISCHARGES; ELECTRON TUBES; ELECTRONS; HELIUM; METEOROLOGY; MICROWAVE TUBES; MICROWAVES; NEON; NUCLEAR PHYSICS; OXIDE MINERALS; PLASMA DIAGNOSTICS; PLASMAS; QUARTZ; RADIOACTIVITY; SPECTROSCOPIC ANALYSIS; SURFACE WAVES; THERMODYNAMICS;

ABSORBED POWER; CHARACTERISTIC PARAMETERS; ELECTRON DENSITIES; EXPERIMENTAL CONDITIONS; GAS TEMPERATURES; HELIUM PLASMAS; MICROWAVE DISCHARGE; MICROWAVE DISCHARGES; NEON PLASMA; NOBLE GAS; OPTICAL EMISSION SPECTROSCOPY; QUARTZ TUBES; SPECTROSCOPIC CHARACTERIZATIONS; SPECTROSCOPIC STUDIES;

INERT GASES;

EID: 50149098346     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sab.2008.05.008     Document Type: Article

References (58)

1. Microwave discharges: Fundamentals and Applications, edited by C.M. Ferreira and M. Moisan, NATO ASI Series B, Vol. 302 (Plenum, New York, 1993)
2. Moreau S., Moisan M., Tabrizian M., Barbeau J., Pelletier J., Ricard A., and Yahia L. Using the flowing afterglow of a plasma to inactivate Bacillus subtilis spores: influence of the operating conditions. J. Appl. Phys. 88 (2000) 1166-1174
3. Kabouzi Y., Moisan M., Rostaing J.C., Trassy C., Guerin D., Keroack D., and Zakrzewski Z. Abatement of perfluorinated compounds using microwave plasmas at atmospheric pressure. J. Appl. Phys. 93 (2003) 9483-9496
4. Ilías S., Campillo C., Borges C.F.M., and Moisan M. Diamond coatings deposited on tool materials with a 915 MHz scaled up surface-wave-sustained plasma. Diamond Relat. Mater. 9 (2000) 1120-1124
5. Moisan M., Zakrzewski Z., Pantel R., and Leprince P. A waveguide-based launcher to sustain long plasma columns through the propagation of an electromagnetic surface-wave. IEEE Trans. Plasma Sci. 12 (1984) 203-214
6. Chaker M., Moisan M., and Zakrzewski Z. Microwave and rf surface-wave sustained discharges as plasma sources for plasma chemistry and plasma processing. Plasma Chem. Plasma Process. 6 (1986) 79-96
7. Moisan M., Chaker M., Zakrzewski Z., and Paraszczak J. The wave-guide surfatron - a high-power surface-wave launcher to sustain large-diameter dense-plasma columns. J. Phys. E 20 (1987) 1356-1361
8. Sauvé G., Moisan M., and Zakrzewski Z. Slotted wave-guide field applicator for the generation of long uniform plasmas. J. Microw. Power Electromagn. Energy 28 (1993) 123-131
9. Ricard A., St-Onge L., Malvos H., Gicquel A., Hubert J., and Moisan M. Microwave-excited plasma torch - 2 complementary configurations. J. Phys. III 5 (1995) 1269-1285
10. Moisan M., Zakrzewski Z., Grenier R., and Sauvé G. Large-diameter plasma generation using a wave-guide-based field applicator at 2.45-GHz. J. Microw. Power Electromagn. Energy 30 (1995) 58-65
11. Sauvé G., Moisan M., Zakrzewski Z., and Bishop C.A. Sustaining long linear uniform plasmas with microwaves using a leaky-wave (troughguide) field applicator. IEEE Trans. Antennas Propag. 43 (1995) 248-256
12. Zakrzewski Z., and Moisan M. Plasma sources using long linear microwave field applicators - main features, classification and modelling. Plasma Sources Sci. Technol. 4 (1995) 379-397
13. Moisan M., Grenier R., and Zakrzewski Z. The electromagnetic performance of a surfatron-based coaxial microwave plasma torch. Spectrochim. Acta Part B 50 (1995) 781-789
14. Moisan M., Zakrzewski Z., and Rostaing J.C. Waveguide-based single and multiple nozzle plasma torches: the TIAGO concept. Plasma Sources Sci. Technol. 10 (2001) 387-394
15. Zakrzewski Z., and Moisan M. Linear field applicators. J. Phys. IV 8 P7 (1998) 109-118
16. Pollak J., Moisan M., and Zakrzewski Z. Long and uniform plasma columns generated by linear field-applicators based on stripline technology. Plasma Sources Sci. Technol. 16 (2007) 310-323
17. Fleish T., Kabouzi Y., Moisan M., Pollak J., Castaños-Martínez, Nowakowska H., and Zakrzewski Z. Designing an efficient microwave-plasma source, independent of operating conditions, at atmospheric pressure. Plasma Sources Sci. Technol. 16 (2007) 173-182
18. Calzada M.D., Moisan M., Gamero A., and Sola A. Experimental investigation and characterization of the departure from local thermodynamic equilibrium along a surface-wave-sustained discharge at atmospheric pressure. J. Appl. Phys. 80 (1996) 46-55
19. Calzada M.D., Sáez M., and García M.C. Characterization and study of the thermodynamic equilibrium departure of an argon plasma flame produced by a surface-wave sustained discharge. J. Appl. Phys. 88 (2000) 34-39
20. Calzada M.D., García M.C., Luque J.M., and Santiago I. Influence of the thermodynamic equilibrium state in the excitation of samples by a plasma at atmospheric pressure. J. Appl. Phys. 92 (2002) 2269-2275
21. García M.C., Rodero A., Sola A., and Gamero A. Spectroscopic study of a stationary surface-wave sustained argon plasma column at atmospheric pressure. Spectrochim. Acta Part B 55 (2000) 1733-1745
22. Margot J. Studies of emission spectra in helium plasmas at atmospheric pressure and local thermodynamical equilibrium. Phys. Plasmas 8 (2001) 2525-2531
23. Sáinz A., Margot J., García M.C., and Calzada M.D. Role of dissociative recombination in the excitation kinetics of an argon microwave plasma at atmospheric pressure. J. Appl. Phys. 97 (2005) No.113305
24. Kabouzi Y., Calzada M.D., Moisan M., Tran K.C., and Trassy C. Radial contraction of microwave-sustained plasma columns at atmospheric pressure. J. Appl. Phys. 91 (2002) 1008-1019
25. Kabouzi Y., and Moisan M. Pulsed microwave discharges sustained at atmospheric pressure: study of the contraction and filamentation phenomena. IEEE Trans. Plasma Science 33 (2005) 292-293
26. Nowakowska H., Jasinski M., Mizeraczyk J., Zarkrzewski Z., Kabouzi Y., Castaños-Martínez E., and Moisan M. Surface-wave sustained discharge in neon at atmospheric pressure: model and experimental verification. Czech. J. Phys. 56 (2006) B964-B970
27. van der Mullen J.A.M. Excitation equilibria in plasmas - a classification. Phys. Rep.-Rev. Sect of Physics Letters 191 (1990) 109-220
28. van der Mullen J.A.M., Benoy D.A., Fey F.H.A.G., van der Sidje B., and Vlček J. Saha equation for 2-temperature plasmas - theories, experimental-evidence, and interpretation. Phys. Rev. E 50 (1994) 3925-3934
29. Jonkers J., Vos H.P.C., van der Müllen J.A.M., and Timmermans E.A.H. On the atomic state densities of plasmas produced by the "Torche a Injection Axiale". Spectrochim. Acta Part B 51 (1996) 457-465
30. Rodero A., García M.C., Quintero M.C., Sola A., and Gamero A. An experimental study of the deviation from equilibrium in a high-pressure microwave helium plasma produced by an axial injection torch. J. Phys. D 29 (1996) 681-686
31. Kafrouni H., and Vacquié S. J. Phys D: Appl. Phys. 10 (1997) 1607-1616
32. Fujimoto T., and McWhriter R.W. Validity criteria for local thermodynamic-equilibrium in plasma spectroscopy. Phys. Rev. A 42 (1990) 6588-6601
33. Fujimoto T. Kinetics of ionization-recombination of a plasma and population-density of excited ions. 2. Ionizing plasma. J. Phys. Soc. Jap. 47 (1979) 273-281
34. Griem H.R. Spectral Line Broadening by Plasmas (1974), Academic, New York
35. Gigosos M.A., and Cardeñoso V. New plasma diagnosis tables of hydrogen Stark broadening including ion dynamics. J. Phys. B 29 (1996) 4795-4838
36. Gigosos M.A., González M.A., and Cardeñoso V. Computer simulated Balmer-alpha, -beta and -gamma Stark line profiles for non-equilibrium plasmas diagnostics. Spectrochim. Acta Part B 58 (2003) 1489-1504
37. Mermet J.M. In: Bowmans P.W.J.M. (Ed). Inductively Coupled Plasma Emission Spectrometry, Part II: Applications and Fundamentals (1987), Wiley-Interscience, New York
38. Bastiaans G.J., and Mangold R.A. The calculation of electron-density and temperature in Ar spectroscopic plasmas from continuum and line spectra. Spectrochim. Acta Part B 40 (1985) 885-892
39. Sola A., Calzada M.D., and Gamero A. On the use of the line-to-continuum intensity ratio for determining the electron-temperature in a high-pressure argon surface-microwave discharge. J. Phys. D. 28 (1995) 1099-1110
40. Jonkers J., Regt J.M., van der Mullen J.A.M., Vos H.P.C., de Groote F.P.J., and Timmermans E.A.H. On the electron temperatures and densities in plasmas produced by the "Torche a Injection Axiale". Spectrochim. Acta Part B 51 (1996) 1385-1392
41. Yan J.D., Pau C.F., Wylie S.R., and Fang M.T.C. Experimental characterization of an atmospheric argon plasma jet generated by an 896 MHz microwave system. J. Phys. D: Appl. Phys. 35 (2002) 2594-2604
42. Jolly J., and Touzeau M. Measurement of metastable-state densities by self-absorption technique. J. Quant. Spectrosc. Radiat. Transfer. 15 (1975) 863-872
43. Santiago I., Christova M., García M.C., and Calzada M.D. Self-absorbing method to measure the population of the metastable levels in an argon microwave plasma at atmospheric pressure. Eur. Phys. J. Appl. Phys. 28 (2004) 325-330
44. Santiago I., and Calzada M.D. Population measurement of the 3p(5)4 s configuration levels in an argon microwave plasma at atmospheric pressure. Appl. Spectrosc. 61 (2007) 725-733
45. C. Yubero, M.C. García and M.D. Calzada, Using halogen lamp to calibrate an optical system of UV-VIS radiation, Optica Applicata 38 (accepted for publication).
46. Reader J., Corliss C.H., Wiese W.L., and Martin G.A. Wavelenghts and Transition Probabilities for Atoms and Atomic Ions, NSRDS-NBS 68 (1980) Whasington D.C.
47. Sáinz A., Díaz A., Casas D., Pineda M., Cubillo F., and Calzada M.D. Abel inversion applied to a small set of emission data from a microwave plasma. Appl. Spectrosc. 60 (2006) 229-236
48. In: Moisan M., and Pelletier J. (Eds). Microwave Excited Plasmas (1992), Elsevier, New York
49. Granier A., Boisse-Laporte C., Leprince P., Marec J., and Nghiem P. Wave-propagation and diagnostics in argon surface-wave discharges up to 100-torr. J. Phys. D 20 (1987) 204-209
50. Robertson A.G. Momentum-transfer cross-section for low-energy electrons in neon. J. Phys. B 5 (1972) 648-&
51. Moisan M., Pantel R., and Hubert J. Propagation of a surface-wave sustaining a plasma-column at atmospheric-pressure. Contrib. Plasma Phys. 30 (1990) 293-314
52. Alves L.L., and Ferreira C.M. Electron kinetics in weakly ionized helium under dc and hf applied electric-fields. J. Phys. D 24 (1991) 581-592
53. Pérès A., Alves L.L., Margot J., Sadi T., Ferreira C.M., Tran K.C., and Hubert J. Plasma Chem. Plasma Process. 19 467 (1999)
54. K.C. Tran, M. Sc. Thesis, Université de Montréal (1995).
55. Santiago I., García M.C., and Calzada M.D. Experimental method for determining the damping parameter of spectral lines emitted by a microwave plasma at atmospheric pressure. Appl. Spectrosc. 59 (2005) 1457-1464
56. Sáinz A., Calzada M.D., and García M.C. Mem.S.A.It 7 232 (2005)
57. Christova M., Castaños-Martínez E., Calzada M.D., Kabouzi Y., Luque J.M., and Moisan M. Electron density and gas temperature from line broadening in an argon surface-wave-sustained discharge at atmospheric pressure. App. Spectrosc. 58 (2004) 1032-1037
58. Calzada M.D., Rodero A., Sola A., and Gamero A. Excitation kinetic in an argon plasma column produced by a surface wave at atmospheric pressure. J. Phys. Soc. Jpn. 65 (1996) 948-954