Deconvolution of Kelvin probe force microscopy measurements - Methodology and application

Measurement Science and Technology

Volumn 20, Issue 8, 2009, Pages

  MacHleidt, T ^a   Sparrer, E ^a   Kapusi, D ^a   Franke, K H ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Deconvolution; Kelvin probe force microscopy; Lateral resolution; Point spread function; Scanning probe microscopy

Indexed keywords

ATOMIC FORCE MICROSCOPY; MATERIALS TESTING; OPTICAL TRANSFER FUNCTION; SCANNING PROBE MICROSCOPY; SURFACE POTENTIAL;

AMBIENT CONDITIONS; DECONVOLUTION ALGORITHM; INTRINSIC POINT; KELVIN PROBE FORCE MICROSCOPY; LATERAL RESOLUTION; LINEAR SHIFT INVARIANTS; MATERIALS RESEARCH; SIGNAL FORMATION;

DECONVOLUTION;

EID: 70350683485     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/8/084017     Document Type: Article

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