Fabrication and performance characteristics of high-frequency micromachined bulk acoustic wave quartz resonator arrays

Measurement Science and Technology

Volumn 20, Issue 12, 2009, Pages

  Kao, Ping ^a   Allara, David ^b   Tadigadapa, Srinivas ^a,b  

^a The Pennsylvania State University   (United States)

^b PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

Immunoglobulin G; Langmuir isotherm; Protein monolayers; QCM; Quartz resonators; Viscoelastic properties

Indexed keywords

IMMUNOGLOBULIN G; LANGMUIR ISOTHERM; PROTEIN MONOLAYERS; QUARTZ RESONATORS; VISCOELASTIC PROPERTIES;

ACOUSTICS; ADSORPTION; ADSORPTION ISOTHERMS; CRYSTAL RESONATORS; ELASTIC MODULI; EQUILIBRIUM CONSTANTS; FABRICATION; INDUCTIVELY COUPLED PLASMA; LIQUIDS; MONOLAYERS; OPTICAL RESONATORS; PLASMA ETCHING; PROTEINS; QUARTZ; QUARTZ CRYSTAL MICROBALANCES; VISCOELASTICITY; VISCOSITY;

OXIDE MINERALS;

EID: 70350625888     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/12/124007     Document Type: Article

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