Multicomponent nanostructured films for various tribological applications

International Journal of Refractory Metals and Hard Materials

Volumn 28, Issue 1, 2010, Pages 32-39

  Shtansky, D V ^a   Kiryukhantsev Korneev, Ph V ^a   Bashkova, I A ^a   Sheveiko, A N ^a   Levashov, E A ^a  

^a NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY MISIS   (Russian Federation)

Author keywords

Friction; Magnetron sputtering; Multicomponent nanostructured films; SHS composite targets; Wear

Indexed keywords

BEARING CONDITIONS; COMPOSITE TARGET; CORROSION AND OXIDATION; CORROSIVE ENVIRONMENT; ENGINEERING MATERIALS; HARD FILMS; LOAD-BEARING; MECHANICAL AND TRIBOLOGICAL PROPERTIES; METALLIC IMPLANTS; MULTI-LAYERED; MULTICOMPONENT NANOSTRUCTURED FILMS; MULTICOMPONENTS; NANO-STRUCTURED; NANOSTRUCTURED FILMS; SELF-PROPAGATING HIGH TEMPERATURE SYNTHESIS; SHS-COMPOSITE TARGETS; TEMPERATURE FLUCTUATION; THERMAL STABILITY; TRIBOLOGICAL APPLICATIONS; TRIBOLOGICAL PROPERTIES; WEAR;

ALLOYING ELEMENTS; BEARINGS (MACHINE PARTS); BIOCOMPATIBILITY; BORIDES; CALCIUM; CARBIDES; CHROMIUM; CORROSION; CORROSION RESISTANCE; FRICTION; ION BOMBARDMENT; ION IMPLANTATION; MAGNETRONS; MECHANICAL PROPERTIES; NANOCOMPOSITES; NANOSTRUCTURED MATERIALS; NITRIDES; SILICON; SOLAR BUILDINGS; SPECTROMETERS; TANTALUM; TARGETS; TRIBOLOGY; ZIRCONIUM;

COMPOSITE FILMS;

EID: 70350572459     PISSN: 02634368     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijrmhm.2009.07.014     Document Type: Article

References (65)

1. Shtansky D.V., Sheveiko A.N., Petrzhik M.I., Kiryukhantsev-Korneev Ph.V., Levashov E.A., Leyland A., et al. Hard tribological Ti-B-N, Ti-Cr-B-N, Ti-Si-B-N and Ti-Al-Si-B-N Films. Surf Coat Technol 200 (2005) 208-212
2. Levashov EA, Rogachev AS, Ukhvid VI, Borovinskaya IP. Physico-chemical and technological bases of self-propagating high-temperature synthesis. Moscow: Binom; 1999, pp. 134-47 (in Russian).
3. Berg S., and Katardjiev I.V. Preferential sputtering effects in thin film processing. J Vac Sci Technol A17 4 (1999) 1916-1925
4. Jonsson L.B., Nyberg T., and Berg S. Target compound layer formation during reactive sputtering. J Vac Sci Technol A17 4 (1999) 1827-1831
5. Levashov E.A., Kurbatkina V.V., Rogachev A.S., Kochetov N.A., Patsera E.I., and Sachkova N.V. Characteristic properties of combustion and structure formation in the Ti-Ta-C system. Russian J Non-Ferrous Metals 49 5 (2008) 404-413
6. 2 system. Int J SHS 16 4 (2007) 218-224
7. 3-TiN. J Mater Synth Process 10 6 (2002) 319-330
8. x)N films for cutting tools prepared by the cathodic arc ion plating method. J Vac Sci Technol A 10 4 (1992) 1749-1756
9. Lee D.B., Kim M.H., Lee Y.C., and Kwon S.C. High temperature oxidation of TiCrN films deposited on a steel substrate by ion plating. Surf Coat Technol 141 (2001) 232-239
10. Endrino J.L., Fox-Rabinovich G.S., Reiter A., Veldhuis S.V., Escobar Galindo R., Albella J.M., and Marco J.F. Oxidation tuning in AlCrN films. Surf Coat Technol 201 (2007) 4505-4511
11. xN thin films deposited by reactive magnetron sputtering. Surf Coat Technol 163-164 (2003) 57-61
12. Choi J.B., Cho K., Lee M.-H., and Kim K.-H. Effects of Si content and free Si on oxidation behavior of Ti-Si-N film layers. Thin Solid Films 447-448 (2004) 365-375
13. Veprek S., Veprek-Heijman M.G.J., Karvankova P., and Prochazka J. Different approaches to superhard films and nanocomposites. Thin Solid Films 476 (2005) 1-29
14. x nanocomposite thin films. J Mater Res 20 (2005) 2754-2762
15. 2 nanocomposite films deposited by plasma chemical vapor deposition. Thin Solid Films 467 (2004) 133-139
16. Chang Y.-Y., Chang C.-P., Wang D.-Y., Yang S.-M., and Wu W. High temperature oxidation resistance of CrAlSiN films synthesized by a cathodic arc deposition process. J Alloys Compd 461 (2008) 336-341
17. Yang Q., Zhao L.R., Cai F., Yang S., and Teer D.G. Wear, erosion and corrosion resistance of CrTiAlN film deposited by magnetron sputtering. Surf Coat Technol 202 (2008) 3886-3892
18. Fox-Rabinovich G.S., Yamomoto K., Veldhuis S.C., Kovalev A.I., and Dosbaeva G.K. Tribological adaptability of TiAlCrN PVD films under high performance dry machining conditions. Surf Coat Technol 200 (2005) 1804-1813
19. Yamamoto K., Kujime S., and Takahara K. Structural and mechanical property of Si incorporated (Ti, Cr, Al)N films deposited by arc ion plating process. Surf Coat Technol 200 (2005) 1383-1390
20. Imamura S., Fukui H., Shibata A., Omori N., and Setoyama M. Properties and cutting performance of AlTiCrN/TiSiCN bilayer films deposited by cathodic-arc ion plating. Surf Coat Technol 202 (2007) 820-825
21. x)N superhard nanocomposite films reaching the hardness of diamond. Surf Coat Technol 120-121 (1999) 173-178
22. Männling H.-D., Patil D.S., Moto K., Jílek M., and Veprek S. Thermal stability of superhard nanocomposite films consisting of immiscible nitrides. Surf Coat Technol 146-147 (2001) 263-267
23. Kiryukhantsev-Korneev Ph.V., Shtansky D.V., Petrzhik M.I., Levashov E.A., and Mavrin B.N. Thermal stability and oxidation resistance of Ti-B-N, Ti-Cr-B-N, Ti-Si-B-N and Ti-Al-Si-B-N films. Surf Coat Technol 201 (2007) 6143-6147
24. Shtansky D.V., Kiryukhantsev-Korneev Ph.V., Sheveiko A.N., Kutyrev A.E., and Levashov E.A. Hard tribological Ti-Cr-B-N films with enhanced thermal stability, corrosion- and oxidation-resistance. Surf Coat Technol 202 (2007) 861-865
25. Veprek S., and Argon A.S. Towards the understanding of mechanical properties of super- and ultrahard nanocomposites. J Vac Sci Technol B 20 (2002) 650-664
26. Paternoster C., Fabrizi A., Cecchini R., Spigarelli S., Kiryukhantsev-Korneev Ph.V., and Sheveiko A. Thermal evolution and mechanical properties of hard Ti-Cr-B-N and Ti-Al-Si-B-N coatings. Surf Coat Technol 203 (2008) 736-740
27. Rebholz C., Ziegele H., Leyland A., and Matthews A. Structure, mechanical and tribological properties of Ti-B-N and Ti-Al-B-N multiphase thin films produced by electron-beam evaporation. J Vac Sci Technol A 16 (1998) 2851-2857
28. Bull S.J., Bhat D.G., and Staia M.H. Properties and performance of commercial TiCN films. Part 2: Tribological performance. Surf Coat Technol 163-164 (2003) 507-514
29. Chu K., Shum P.W., and Shen Y.G. Substrate bias effects on mechanical and tribological properties of substitutional solid solution (Ti, Al)N films prepared by reactive magnetron sputtering. Mater Sci Eng B 131 (2006) 62-71
30. 2/TiC and tungsten co-sputtered wear films. Surf Coat Technol 153 (2002) 25-30
31. Zhong D., Sutter E., Moore J.J., Mustoe G.G.W., Levashov E.A., and Disam J. Mechanical properties of Ti-B-C-N films deposited by magnetron sputtering. Thin Solid Films 398-399 (2001) 320-325
32. Vlček J., Potocký S., Čižek J., Houška J., Peřina V., Zemek J., et al. Reactive magnetron sputtering of hard Si-B-C-N films with a high-temperature oxidation resistance. J Vac Sci Technol A 23 6 (2005) 1513-1522
33. Vlcek J, Capek P, Zeman R, Cerstvy. Hard amorphous Si-B-C-N coatings with ultra-high thermal stability. In: Nanotechnology international forum RUSNANOTECH-08, Moscow, vol. 2. 2008. p. 297-8.
34. Audronis M., Kelly P.J., Arnell R.D., Leyland A., and Matthews A. Deposition of multicomponent chromium boride based films by pulsed magnetron sputtering of powder targets. Surf Coat Technol 200 (2005) 1616-1623
35. 2. Surf Coat Technol 105 (1998) 45-50
36. 2 composite films. Mater Sci Eng A 209 (1996) 372-376
37. 2 films produced by dc magnetron co-deposition. Surf Coat Technol 108 /109 (1998) 345-351
38. Voevodin A.A., and Zabinski J.S. Laser surface texturing for adaptive solid lubrication. Wear 261 (2006) 1285-1292
39. Voevodin A.A., and Zabinski J.S. Nanocomposite and nanostructured tribological materials for space applications. Compos Sci Technol 65 (2005) 741-748
40. 2 films. Surf Coat Technol 193 (2005) 230-233
41. x-based films deposited onto high speed steel by magnetron sputtering. Surf Coat Technol 201 (2006) 4099-4104
42. 2-x. J Cryst Growth 60 (1982) 9-13
43. x/TiSiN films. Surf Coat Technol 183 (2004) 328-336
44. 2 targets. Surf Coat Technol 202 (2008) 5953-5961
45. 2 (M = Mo, W; X = S, Se) nanoparticles. Nanotechnology 15 (2004) 828-832
46. Zabinski J.S., Donley M.S., Prasad S.V., and McDevitt N.T. Synthesis and characterization of tungsten disulphide films grown by pulsed-laser deposition. J Mater Sci 29 (1994) 4834-4839
47. Prasad S.V., Zabinski J.S., and McDevitt N.T. Friction behavior of pulsed deposited tungsten disulfide films. Tribol Trans 38 (1995) 57-62
48. 2. Surf Coat Technol 105 (1998) 45-50
49. 2 films. Surf Coat Technol 92 (1997) 120-128
50. Piscanec S., Ciacchi L.C., Vesselli E., Comelli G., Sbaizero O., Meriani S., and De Vita A. Bioactivity of TiN-coated titanium implants. Acta Mater 52 (2004) 1237-1245
51. 2 film on Ti for biomedical applications. J Electrochem Soc 151 (2004) D127-D133
52. Grill A. Diamond-like carbon films as biocompatible materials-an overview. Diamond Relat Mater 12 (2003) 166-170
53. Liu X., Chu P.K., and Ding C. Surface modification of titanium, titanium alloys, and related materials for biomedical applications. Mat Sci Eng R 47 (2004) 49-121
54. ® ceramic in human parotid saliva. Biomaterials 21 (2000) 1735-1741
55. Kokubo T., Kim H.-M., and Kawashita M. Novel bioactive materials with different mechanical properties. Biomaterials 24 (2003) 2161-2175
56. Nonami T., and Tsutsumi S. Study of diopside ceramics for biomaterials. J Mater Sci - Mater M 10 (1999) 475-479
57. Shtansky D.V., Gloushankova N.A., Bashkova I.A., Kharitonova M.A., Moizhess T.G., Sheveiko A.N., et al. Ta-doped multifunctional bioactive nanostructured films. Surf Coat Technol 202 (2008) 3615-3624
58. Shtansky D.V., Gloushankova N.A., Bashkova I.A., Petrzhik M.I., Sheveiko A.N., Kiryukhantsev-Korneev Ph.V., et al. Multifunctional biocompatible nanostructured films for load-bearing implants. Surf Coat Technol 201 (2006) 4111-4118
59. Shtansky D.V., Gloushankova N.A., Bashkova I.A., Kharitonova M.A., Moizhess T.G., Sheveiko A.N., et al. Multifunctional Ti-(Ca, Zr)-(C, N, O, P) films for load-bearing implants. Biomaterials 27 (2006) 3519-3531
60. Shtansky D.V., Glushankova N.A., Sheveiko A.N., Kharitonova M.A., Moizhess T.G., Levashov E.A., and Rossi F. Design, characterization and testing of TiC-based multicomponent films for load-bearing biomedical applications. Biomaterials 26 (2005) 2909-2924
61. y films for biomedical applications. Surf Coat Technol 182 (2004) 101-111
62. Shtansky D.V., Bashkova I.A., Levashov E.A., Chipysheva T.A., Vasil'ev Yu.M., and Glushankova N.A. Multifunctional Nanostructural Films for Load-bearing Implants. Dokl Biochem Biophys 404 (2005) 336-338
63. Kulisch W., Colpo P., Gibson P.N., Ceccone G., Shtansky D.V., Levashov E.A., and Rossi F. ICP assisted sputter deposition of TiC/CaO nanocomposite films. Surf Coat Technol 188-189 (2004) 735-740
64. Kulisch W., Colpo P., Gibson P.N., Ceccone G., Shtansky D.V., Levashov E.A., et al. Hybrid ICP/sputter deposition of TiC/CaO nanocomposite films for biomedical applications. J Appl Phys A82 (2006) 503-507
65. Shtansky D.V., Petrzhik M.I., Bashkova I.A., Kiryukhantsev-Korneev F.V., Sheveiko A.N., and Levashov E.A. Adhesion, friction, and deformation characteristics of Ti-(Ca, Zr)-(C, N, O, P) films for orthopedic and dental implants. Phys Solid State 48 7 (2006) 1301-1308