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Volumn 96, Issue 4, 2009, Pages 985-990

Optical and IR studies on r.f. magnetron sputtered ultra-thin MoO 3 films

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION EDGES; IR TRANSMITTANCE SPECTRA; OPTICAL TRANSMISSION SPECTRUM; R.F. MAGNETRON SPUTTERING; SI SUBSTRATES; SPUTTERING PRESSURES; SUBSTRATE TEMPERATURE; ULTRA-THIN;

EID: 70350572296     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-009-5132-3     Document Type: Article
Times cited : (20)

References (22)
  • 9
    • 0020876944 scopus 로고
    • CURRENT-VOLTAGE CHARACTERISTIC OF MAGNETRON SPUTTERING SYSTEMS.
    • DOI 10.1063/1.332006
    • W.D. Westwood S. Maniv P.J. Scanlon 1983 J. Appl. Phys. 54 6841 10.1063/1.332006 1983JAP....54.6841W (Pubitemid 14507120)
    • (1983) Journal of Applied Physics , vol.54 , Issue.12 , pp. 6841-6846
    • Westwood, W.D.1    Maniv, S.2    Scanlon, P.J.3
  • 11
  • 12
    • 0023593728 scopus 로고
    • SYNTHESIS AND PROPERTIES OF THIN FILM POLYMORPHS OF MOLYBDENUM TRIOXIDE.
    • DOI 10.1016/0040-6090(87)90452-4
    • P.F. Carcia E.M. McCarron III 1987 Thin Solid Films 155 55 10.1016/0040-6090(87)90452-4 1987TSF...155...53C (Pubitemid 18552117)
    • (1987) Thin Solid Films , vol.155 , Issue.1 , pp. 53-63
    • Carcia, P.F.1    McCarron III, E.M.2
  • 22
    • 33847307586 scopus 로고    scopus 로고
    • 10.1143/JPSJ.75.074712 2006JPSJ.75g4712K
    • M. Kurumada Ch. Kaito 2006 J. Phys. Soc. Jpn. 75 074712 10.1143/JPSJ.75.074712 2006JPSJ...75g4712K
    • (2006) J. Phys. Soc. Jpn. , vol.75 , pp. 074712
    • Kurumada, M.1    Kaito, Ch.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.