Evolving MEMS resonator designs for fabrication

Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)

Volumn 5216 LNCS, Issue , 2008, Pages 213-224

  Hornby, Gregory S ^a   Kraus, William F ^b   Lohn, Jason D ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MICROELECTROMECHANICAL DEVICES; RESONATORS;

ACTUAL CHIPS; AUTOMATED DESIGN; CURRENT STATUS; ENGINEERING DESIGN; EVALUATION OF DESIGNS; HIGH RELIABILITY; MEMS RESONATORS; MICROELECTROMECHANICAL (MEMS);

MACHINE DESIGN;

EID: 70349860115     PISSN: 03029743     EISSN: 16113349     Source Type: Book Series    
DOI: 10.1007/978-3-540-85857-7_19     Document Type: Conference Paper

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