Genetic algorithms in MEMS synthesis

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 299-303

  Li, Hui ^a   Antonsson, Erik K ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GENETIC ALGORITHMS; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT MANUFACTURE; MASKS; RANDOM PROCESSES;

MASK LAYOUTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032294678     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)