Microfabrication of conductive PDMS on flexible substrates for biomedical applications

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Volumn , Issue , 2009, Pages 731-734

  Cong, Hailin ^a   Pan, Tingrui ^a  

^a University of California   (United States)

Author keywords

Conductive photoresist; Microfabrication; Photolithography; Polydimethylsiloxane (PDMS); Silver powder

Indexed keywords

A-THERMAL; BIOMEDICAL APPLICATIONS; CAPACITIVE PRESSURE SENSORS; CONDUCTIVE FILLERS; CONDUCTIVE PHOTORESIST; FEATURE RESOLUTION; FLEXIBLE SUBSTRATE; MATRIX; MICROFABRICATED DEVICES; MICROMACHINED; PHOTOPATTERNABILITY; POLYDIMETHYLSILOXANE (PDMS); SENSING APPLICATIONS; SILVER POWDER; SILVER POWDERS; STANDARD PHOTOLITHOGRAPHY;

BIOLOGICAL MATERIALS; CONTACT LENSES; FILLERS; MICROANALYSIS; MICROCHANNELS; MICROFABRICATION; MICROMACHINING; ORGANIC POLYMERS; PHOTOLITHOGRAPHY; PHOTORESISTORS; POWDER METALLURGY; POWDERS; SILVER; SURFACE TREATMENT;

SILICONES;

EID: 70349690774     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2009.5068682     Document Type: Conference Paper

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