Design of a four-arm structure MEMS gripper integrated with sidewall force sensor

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Volumn , Issue , 2009, Pages 75-79

  Chen, Tao ^a   Chen, Liguo ^a   Liu, Baixu ^a   Wang, Jiachou ^a   Li, Xinxin ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

Electrostatic comb drive; MEMS; Microgripper; Sidewall piezoresistive sensor

Indexed keywords

ARM STRUCTURES; BULK MICROMACHINING TECHNOLOGY; ELECTROSTATIC COMB DRIVE; ELECTROSTATICALLY DRIVEN; ETCHING TECHNIQUE; FORCE SENSOR; GRIPPING FORCE; MICRO MANIPULATION; MICROASSEMBLY SYSTEM; MICROGRIPPER; PIEZORESISTIVE FORCE SENSORS; PIEZORESISTIVE SENSORS; PIEZORESISTOR; SIDEWALL PIEZORESISTIVE SENSOR; SILICON ON INSULATOR WAFERS; SINGLE-CRYSTAL SILICON WAFERS;

ELECTROSTATICS; GRIPPERS; MEMS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON COMPOUNDS; SENSORS; SILICON WAFERS; SINGLE CRYSTALS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 70349659207     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2009.5068530     Document Type: Conference Paper

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