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Volumn , Issue , 2009, Pages 131-133
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Metrology of 3D IC with X-ray microscopy and nano-scale X-ray CT
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
3-D INTEGRATED CIRCUIT;
3D STRUCTURE;
COMPUTED TOMOGRAPHY;
DEEP PENETRATION;
ELEMENTAL COMPOSITIONS;
NANO SCALE;
NANO-CT;
NM RESOLUTION;
X RAY MICROSCOPY;
X-RAY CT;
COMPUTERIZED TOMOGRAPHY;
FAILURE ANALYSIS;
INTEGRATED CIRCUITS;
INTERCONNECTION NETWORKS;
MEASUREMENTS;
QUALITY ASSURANCE;
SAFETY FACTOR;
TECHNOLOGY;
THREE DIMENSIONAL;
TOMOGRAPHY;
X RAY MICROSCOPES;
INTEGRATED CIRCUIT LAYOUT;
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EID: 70349449876
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/IITC.2009.5090362 Document Type: Conference Paper |
Times cited : (7)
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References (5)
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