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Volumn , Issue , 2009, Pages 131-133

Metrology of 3D IC with X-ray microscopy and nano-scale X-ray CT

Author keywords

[No Author keywords available]

Indexed keywords

3-D INTEGRATED CIRCUIT; 3D STRUCTURE; COMPUTED TOMOGRAPHY; DEEP PENETRATION; ELEMENTAL COMPOSITIONS; NANO SCALE; NANO-CT; NM RESOLUTION; X RAY MICROSCOPY; X-RAY CT;

EID: 70349449876     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IITC.2009.5090362     Document Type: Conference Paper
Times cited : (7)

References (5)
  • 1
    • 0004932883 scopus 로고
    • X-ray interactions: Photoabsorption, scattering, transmission, and reflection at E=50-30,000 eV, Z=1-92
    • Henke, B.L., E.M. Gullikson, and J.C. Davis, X-ray interactions: photoabsorption, scattering, transmission, and reflection at E=50-30,000 eV, Z=1-92. Atomic Data and Nuclear Data Tables, 1993. 54: p. 181-342.
    • (1993) Atomic Data and Nuclear Data Tables , vol.54 , pp. 181-342
    • Henke, B.L.1    Gullikson, E.M.2    Davis, J.C.3
  • 2
    • 0008958419 scopus 로고
    • Quantitative micro-and histochemical elementary analysis by Roentgen absorption spectrography
    • Engström, A., Quantitative micro-and histochemical elementary analysis by Roentgen absorption spectrography. Acta Radiologica (Supplementum LXIII), 1946. 63: p. 1-106.
    • (1946) Acta Radiologica (Supplementum LXIII) , vol.63 , pp. 1-106
    • Engström, A.1
  • 3
    • 0028076309 scopus 로고
    • Ultra high resolution x-ray tomography
    • Haddad, W.S., et al., Ultra high resolution x-ray tomography. Science, 1994. 266: p. 1213-1215.
    • (1994) Science , vol.266 , pp. 1213-1215
    • Haddad, W.S.1
  • 4
    • 0001900677 scopus 로고    scopus 로고
    • Tomographic reconstruction of an integrated circuit interconnect
    • Levine, Z.H., et al., Tomographic reconstruction of an integrated circuit interconnect. Applied Physics Letters, 1999. 74(1): p. 150-152.
    • (1999) Applied Physics Letters , vol.74 , Issue.1 , pp. 150-152
    • Levine, Z.H.1
  • 5
    • 10744230761 scopus 로고    scopus 로고
    • A transmission x-ray microscope (TXM) for non-destructive 3D imaging of integrated circuits at sub-100 nm resolution
    • th Symposium for Testing and Failure Analysis, 29 227-233, 2002
    • (2002) th Symposium for Testing and Failure Analysis , vol.29 , pp. 227-233
    • Wang, Y.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.