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Volumn , Issue , 2002, Pages 227-233

A Transmission X-ray Microscope (TXM) for Non-destructive 3D Imaging of ICs at Sub-100 nm Resolution

Author keywords

[No Author keywords available]

Indexed keywords

COPPER INTERCONNECT STRUCTURES; DESTRUCTIVE IMAGING TECHNIQUES; FOCUSED ION BEAM (FIB) TOOLS;

EID: 10744230761     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (11)

References (12)
  • 1
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    • Haddad, W.S.1
  • 2
    • 0032211809 scopus 로고    scopus 로고
    • Cryo x-ray microscopy with high spatial resolution in amplitude and phase contrast
    • Schneider, G., Cryo x-ray microscopy with high spatial resolution in amplitude and phase contrast. Ultramicroscopy, 1998. 75: p. 85-104.
    • (1998) Ultramicroscopy , vol.75 , pp. 85-104
    • Schneider, G.1
  • 3
    • 0033973571 scopus 로고    scopus 로고
    • Soft x-ray microscopy with a cryo STXM: II. Tomography
    • Wang, Y., et al., Soft x-ray microscopy with a cryo STXM: II. Tomography. Journal of Microscopy, 2000. 197: p. 80-93.
    • (2000) Journal of Microscopy , vol.197 , pp. 80-93
    • Wang, Y.1
  • 4
    • 0001085542 scopus 로고    scopus 로고
    • Computed tomography of cryogenic biological specimens based on x-ray microscopic images
    • Weiβ, D., et al., Computed tomography of cryogenic biological specimens based on x-ray microscopic images. Ultramicroscopy, 2000. 84: p. 185-197.
    • (2000) Ultramicroscopy , vol.84 , pp. 185-197
    • Wei, D.1
  • 5
    • 1542373966 scopus 로고    scopus 로고
    • Developments in Limited Data Image Reconstruction Techniques for Ultrahigh-Resolution X-ray Tomographic Imaging of Microchips
    • San Diego, CA: SPIE
    • Haddad, W.S. and J.E. Trebes. Developments in Limited Data Image Reconstruction Techniques for Ultrahigh-Resolution X-ray Tomographic Imaging of Microchips, in Developments in X-ray Tomography. 1997. San Diego, CA: SPIE.
    • (1997) Developments in X-ray Tomography
    • Haddad, W.S.1    Trebes, J.E.2
  • 6
    • 0001900677 scopus 로고    scopus 로고
    • Tomographic reconstruction of an integrated circuit interconnect
    • Levine, Z.H., et al., Tomographic reconstruction of an integrated circuit interconnect. Applied Physics Letters, 1999. 74(1): p. 150-152.
    • (1999) Applied Physics Letters , vol.74 , Issue.1 , pp. 150-152
    • Levine, Z.H.1
  • 7
    • 0000873238 scopus 로고    scopus 로고
    • Tomography of an integrated circuit interconnect with an electromigration void
    • Levine, Z.H., et al., Tomography of an integrated circuit interconnect with an electromigration void. Journal of Applied Physics, 2000. 87(9): p. 4483-4488.
    • (2000) Journal of Applied Physics , vol.87 , Issue.9 , pp. 4483-4488
    • Levine, Z.H.1
  • 8
    • 1542314027 scopus 로고    scopus 로고
    • Hard x-ray microscopy and tomography at the ALS: Experiments and plans
    • Berkeley, CA: American Institute of Physics
    • Yun, W., et al. Hard x-ray microscopy and tomography at the ALS: experiments and plans, in X-ray Microscopy: Proceedings of the Sixth International Conference. 2000. Berkeley, CA: American Institute of Physics.
    • (2000) X-ray Microscopy: Proceedings of the Sixth International Conference
    • Yun, W.1
  • 9
    • 0035952777 scopus 로고    scopus 로고
    • In situ x-ray microscopic observation of the electromigration in passivated Cu interconnects
    • Schneider, G., et al., In situ x-ray microscopic observation of the electromigration in passivated Cu interconnects. Applied Physics Letters, 2001. 78(13): p. 1936-1938.
    • (2001) Applied Physics Letters , vol.78 , Issue.13 , pp. 1936-1938
    • Schneider, G.1
  • 10
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    • Quantitative micro- And histo-chemical elementary analysis by Roentgen absorption spectrography
    • Engström, A., Quantitative micro- and histo-chemical elementary analysis by Roentgen absorption spectrography. Acta Radiologica (Supplementum LXIII), 1946. 63: p. 1-106.
    • (1946) Acta Radiologica (Supplementum LXIII) , vol.63 , pp. 1-106
    • Engström, A.1
  • 11
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    • X-ray interactions: Photoabsorption, scattering, transmission, and reflection at E=5030,000 eV, Z=1-92
    • Henke, B.L., E.M. Gullikson, and J.C. Davis, X-ray interactions: photoabsorption, scattering, transmission, and reflection at E=5030,000 eV, Z=1-92. Atomic Data and Nuclear Data Tables, 1993. 54: p. 181-342.
    • (1993) Atomic Data and Nuclear Data Tables , vol.54 , pp. 181-342
    • Henke, B.L.1    Gullikson, E.M.2    Davis, J.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.