Ultracompact vertically coupled microring resonator with buried vacuum cladding structure

IEEE Photonics Technology Letters

Volumn 17, Issue 1, 2005, Pages 103-105

  Ogata, Masashi ^a   Yoda, Yukihide ^a   Suzuki, Shuichi ^a   Kokubun, Yasuo ^a  

^a YOKOHAMA NATIONAL UNIVERSITY   (Japan)

Author keywords

Buried waveguide; Dense integration; High index contrast; Microring resonator (MRR); Optical waveguide

Indexed keywords

FINITE DIFFERENCE METHOD; LIGHT POLARIZATION; OPTICAL WAVEGUIDES; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICA; SPUTTER DEPOSITION; VACUUM APPLICATIONS;

BURIED VACUUM STRUCTURE; BURIED WAVEGUIDE; DENSE INTEGRATION; HIGH INDEX CONTRAST; MICRORING RESONATOR (MRR);

OPTICAL RESONATORS;

EID: 12344330572     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2004.838628     Document Type: Article

References (7)

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