Synthesis and characterization of plasma-polymerized HMDSO films using an ion gun inverse magnetron source

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  García Luis, Alberto ^a   Corengia, Pablo ^a   González Santamaría, Daniel ^a   Brizuela, Marta ^a   Braceras, Iñigo ^a   Briz, Nerea ^a   Azpiroz, Patxi ^a   Bellido González, Victor ^b   Powell, Sarah ^b  

^a TECNALIA RESEARCH AND INNOVATION   (Spain)

^b Gencoa Ltd   (United Kingdom)

Author keywords

Hexamethyldisiloxane (HMDSO); Indentation; Infrared absorption spectroscopy (IR AS); Optical properties; Plasma polymerization; Wettability

Indexed keywords

CONTACT ANGLE METHOD; DISTILLED WATER; HEXAMETHYL DISILOXANE; HEXAMETHYLDISILOXANE (HMDSO); INFRARED ABSORPTION SPECTROSCOPY (IR-AS); LOW PRESSURES; MAGNETRON SOURCES; NANOINDENTATION TECHNIQUES; PLASMA CONDITIONS; PLASMA PARAMETER; SURFACE MECHANICAL PROPERTIES; SYNTHESIS AND CHARACTERIZATION; WETTABILITY;

ABSORPTION; CONTACT ANGLE; INFRARED ABSORPTION; INFRARED SPECTROSCOPY; MAGNETRONS; MECHANICAL PROPERTIES; OPTICAL PROPERTIES; PLASMA DIAGNOSTICS; PLASMA POLYMERIZATION; PLASMAS; POLYMERS;

ABSORPTION SPECTROSCOPY;

EID: 70349411684     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200731901     Document Type: Conference Paper

References (17)

1. G. Ram Prasad, S. Daniels, D. C. Cameron, B. P. McNamara, E. Tully, R. O'Kennedy, Surf. Coat. Technol. 2005, 200, 1031.
2. T. Hayakawa, M. Yoshinari, K. Nemoto, Biomaterials 2004, 25, 119.
3. U. Kreiseg, R. Gago, M. Vinnichenko, P. Fernandez-Hidalgo, R. J. Martin-Palma, J. M. Martinez-Duart, Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 2004, 908, 219.
4. L. Zajíčková, V. Buršiková, V. Peřina, A. Macková, D. Subedi, J. Janča, S. Smirnov, Surf. Coat. Technol. 2001, 142-144, 449.
5. S. Kurosawa, B.-G. Choi, J.-W. Park, H. Aizawa, K.-B. Shim, K. Yamamoto, Thin Solid Films 2005, 506-507, 176.
6. V. Bellido-Gonzalez, D. Monaghan, S. Powell, A. García, M. Brizuela, Proc. Cong. Ninth International Conference on Plasma Surface Engineering (PSE), Germany 2004, p. 235.
7. K. Aumaille, Thin Solid Films 2000, 359, 188.
8. F. Benitez, E. Martínez, J. Esteve, Thin Solid Films 2000, 377-378, 109.
9. D. Hegemann, H. Brunner, C. Oehr, Nucl. Instrum. Methods Phys. Res. B 2003, 208, 281.
10. X. Ren, M. Bachman, C. E. Sims, G. P. Li, N. L. Allbritton. J. Chromatogr. B 2001, 762, 117.
11. P. Favia, M. Creatore, F. Palumbo, V. Colaprico, R. d Agostino, Surf. Coat. Technol. 142-144, 2001, 1.
12. A. A. Meyer-Plath, Ph.D. Thesis, Ernst-Moritz-Arndt-Universität, Greifswald 2002.
13. D. J. Li, F. Z. Cui, H. Q. Gu, J. Zhao, Appl. Surf. Sci. 1998, 126, 1.
14. Nist Chemistry Weebbook (http://webbook.nist.gov/chemistry).
15. C. Vautrin-Ul, C. Boisse-Laporte, N. Benissad, A. Chausse, P. Leprince, R. Messina, Prog. Org. Coat. 2000, 38, 9.
16. A. M. Wrobel, M. R. Wertheimer, J. Dib, H. P. Schreiber, J. Macromol. Sci. Chem. A 1980, 14(3), 321.
17. W. C. Oliver, G. M. Pharr, J. Mater. Res. 1992. 7(6), 1564.