Surface adhesion control of patterned perfluoro polymer for release technology in the μtAS fabrication process

IEEJ Transactions on Sensors and Micromachines

Volumn 129, Issue 7, 2009, Pages 205-209

  Kobayashi, Taizo ^a   Konishi, Satoshi ^b  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b Department of Micro System Technology ^*  (Japan)

Author keywords

TAS; Fluidic channel; Perfluoro polymer

Indexed keywords

DIAPHRAGM VALVES; FABRICATION PROCESS; FLUIDIC CHANNEL; FLUIDIC CHANNELS; GLASS TRANSITION TEMPERATURE; INITIAL STATE; LAYERED FILMS; PATTERNING PROCESS; PERFLUORO POLYMER; POLYMER LAYERS; POST ANNEALING; SURFACE ADHESION;

ADHESION; FLUIDIC DEVICES; GLASS TRANSITION; TECHNOLOGY;

POLYMERS;

EID: 70349286804     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.129.205     Document Type: Article

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