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Volumn 13, Issue PART A, 2009, Pages 19-23

Development of a low-cost rapid-cycle hot embossing system for microscale parts

Author keywords

[No Author keywords available]

Indexed keywords

COST REDUCTION; SUBSTRATES;

EID: 70349083755     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2008-67372     Document Type: Conference Paper
Times cited : (1)

References (12)
  • 1
    • 0000670335 scopus 로고    scopus 로고
    • Hot embossing - The molding technique for plastic microstructures
    • Heckele, M., Bacher, W., Müller, K.D., 1998, "Hot Embossing - the molding technique for plastic microstructures", Microsystem Technologies, 4, pp. 122-124 (Pubitemid 128529381)
    • (1998) Microsystem Technologies , vol.4 , Issue.3 , pp. 122-124
    • Heckele, M.1    Bacher, W.2    Muller, K.D.3
  • 2
    • 18744368492 scopus 로고    scopus 로고
    • Development of fluid-based heating and pressing systems for micro hot embossing
    • Chang, J., Yang, S., 2005, "Development of fluid-based heating and pressing systems for micro hot embossing", Microsystem Technologies, 11, pp. 396-403.
    • (2005) Microsystem Technologies , vol.11 , pp. 396-403
    • Chang, J.1    Yang, S.2
  • 5
    • 33744552157 scopus 로고    scopus 로고
    • Rapid hot embossing of polymer microfeatures
    • DOI 10.1007/s00542-006-0098-y
    • Kimerling, T., Liu, W., Kim, B., Yao, D., 2006, "Rapid hot embossing of polymer microfeatures", Microsystems Technologies, 12(8), 730-735 (Pubitemid 43814542)
    • (2006) Microsystem Technologies , vol.12 , Issue.8 , pp. 730-735
    • Kimerling, T.E.1    Liu, W.2    Kim, B.H.3    Yao, D.4
  • 6
    • 0036502108 scopus 로고    scopus 로고
    • Hot embossing in microfabrication. Part 1: Experimental
    • Juang, Y.J., Lee, L.J., Koelling, K.W., 2002, "Hot embossing in microfabrication. Part 1: experimental", Polymer Engineering Science, 42(3), pp. 539-550
    • (2002) Polymer Engineering Science , vol.42 , Issue.3 , pp. 539-550
    • Juang, Y.J.1    Lee, L.J.2    Koelling, K.W.3
  • 8
    • 0742268922 scopus 로고    scopus 로고
    • Gas pressurized hot embossing for transcription of micro-features
    • Chang, J.H., Yang, S.Y., 2003, "Gas pressurized hot embossing for transcription of micro-features", Microsystems Technologies, 10, pp. 76-80
    • (2003) Microsystems Technologies , vol.10 , pp. 76-80
    • Chang, J.H.1    Yang, S.Y.2
  • 12
    • 70349115471 scopus 로고    scopus 로고
    • Toward the manufacture of micro and nano features with curable liquid resins: Mold materials and part-to-part dimensional variation
    • Mazzeo, A.D., and Hardt, D.E., 2008, "Toward the manufacture of micro and nano features with curable liquid resins: mold materials and part-to-part dimensional variation.", In Proceedings of the 5th International Symposium on Nanomanufacturing (ISNM)
    • (2008) Proceedings of the 5th International Symposium on Nanomanufacturing (ISNM)
    • Mazzeo, A.D.1    Hardt, D.E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.