Development of hybrid-type MEMS microgripper

Guangxue Jingmi Gongcheng/Optics and Precision Engineering

Volumn 17, Issue 8, 2009, Pages 1928-1934

  Chen, Li Guo ^a   Liu, Bai Xu ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Aspirating and blowing operation; Electrostatic comb driving; MEMS; Microgripper; Micromanipulation

Indexed keywords

ASPIRATING AND BLOWING OPERATION; BULK MICROMACHINING TECHNOLOGY; DRIVING VOLTAGES; ELECTROSTATIC COMB DRIVES; ELECTROSTATIC MICROACTUATORS; FLEXIBLE BEAM SYSTEMS; GAS PIPES; GAS PRESSURE CONTROL; HORIZONTAL MOTION; MICRO-OBJECTS; MICROGRIPPER; MICROMANIPULATION; RELIABLE OPERATION; ROTATIONAL MOTION; SINGLE-CRYSTAL SILICON WAFERS; STRUCTURE AND DYNAMICS;

ELECTROSTATIC ACTUATORS; ELECTROSTATICS; FLEXIBLE STRUCTURES; GAS PIPELINES; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMANIPULATORS; PIPE; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SINGLE CRYSTALS;

GRIPPERS;

EID: 70249094011     PISSN: 1004924X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

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